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- W2029099250 abstract "A −100°C carbon co-implantation into phosphorus-doped source/drain extensions has been developed, providing for low junction leakage. NFETs made using cold carbon co-implantation and ultra-low energy phosphorus ion implantation showed high activation (Rs∼ 500 ohm/sq) and sub-20 nm depth abrupt N+ junction." @default.
- W2029099250 created "2016-06-24" @default.
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- W2029099250 date "2011-06-01" @default.
- W2029099250 modified "2023-09-26" @default.
- W2029099250 title "Cold (−100°C) carbon co-implantation into high phosphorus doping source/drain extensions for aggressively scaled NFETs" @default.
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- W2029099250 doi "https://doi.org/10.1109/iwjt.2011.5970004" @default.
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