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- W2029119077 abstract "Thin-film transistors (TFTs) on glass substrates were fabricated using ZnO, grown by a metallorganic chemical vapor deposition (MOCVD) technique, with N- and Si-rich silicon nitrides as gate dielectrics. This is a report on MOCVD-grown ZnO TFTs that use silicon nitride as gate dielectrics. The ZnO TFTs using N-rich silicon nitride exhibited a field-effect mobility of , a subthreshold slope of 0.8 V/decade, an on/off current ratio of , and a threshold voltage of 2.05 V. The performance of these TFTs is better than that of TFTs employing Si-rich silicon nitride. This enhanced device performance can be attributed to a larger average grain size of 126 nm observed in the ZnO film grown on the N-rich silicon nitride compared to an average grain size of 69 nm for the ZnO film grown on Si-rich silicon nitride." @default.
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- W2029119077 date "2010-01-01" @default.
- W2029119077 modified "2023-10-18" @default.
- W2029119077 title "Enhanced Performance of MOCVD ZnO TFTs on Glass Substrates with Nitrogen-Rich Silicon Nitride Gate Dielectric" @default.
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- W2029119077 doi "https://doi.org/10.1149/1.3247345" @default.
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