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- W2029121329 endingPage "2316" @default.
- W2029121329 startingPage "2309" @default.
- W2029121329 abstract "A novel electrostatically actuated valveless micropump is presented whereby an actuation voltage is applied across a working fluid, which takes advantage of the higher relative electrical permittivity of water and many other fluids with respect to air. The device is fabricated in silicon and the diaphragm is made of electroplated nickel, while the assembly is carried out using flip–chip bonding. A reduced-order model is used to describe the micropump's performance in terms of electrical properties of the fluid, the residual stress in the diaphragm, geometrical features and the actuation voltage. The tested prototype featured a ∼1 µl min−1 flow rate at 50 V actuation voltage. The model predictions show the possibility of achieving flow rates >1 µl min−1 with the actuation voltage <10 V for devices with 3 mm diaphragm size." @default.
- W2029121329 created "2016-06-24" @default.
- W2029121329 creator A5015512495 @default.
- W2029121329 creator A5086773049 @default.
- W2029121329 creator A5087985744 @default.
- W2029121329 date "2005-11-14" @default.
- W2029121329 modified "2023-10-15" @default.
- W2029121329 title "A membrane micropump electrostatically actuated across the working fluid" @default.
- W2029121329 cites W1997059728 @default.
- W2029121329 cites W2003086809 @default.
- W2029121329 cites W2019014472 @default.
- W2029121329 cites W2042480005 @default.
- W2029121329 cites W2051230121 @default.
- W2029121329 cites W2086796866 @default.
- W2029121329 cites W2101647793 @default.
- W2029121329 cites W2116364693 @default.
- W2029121329 cites W2126217049 @default.
- W2029121329 cites W2126847964 @default.
- W2029121329 cites W2145646003 @default.
- W2029121329 cites W2169350264 @default.
- W2029121329 cites W2198973842 @default.
- W2029121329 doi "https://doi.org/10.1088/0960-1317/15/12/013" @default.
- W2029121329 hasPublicationYear "2005" @default.
- W2029121329 type Work @default.
- W2029121329 sameAs 2029121329 @default.
- W2029121329 citedByCount "85" @default.
- W2029121329 countsByYear W20291213292012 @default.
- W2029121329 countsByYear W20291213292013 @default.
- W2029121329 countsByYear W20291213292014 @default.
- W2029121329 countsByYear W20291213292015 @default.
- W2029121329 countsByYear W20291213292016 @default.
- W2029121329 countsByYear W20291213292017 @default.
- W2029121329 countsByYear W20291213292018 @default.
- W2029121329 countsByYear W20291213292019 @default.
- W2029121329 countsByYear W20291213292020 @default.
- W2029121329 countsByYear W20291213292021 @default.
- W2029121329 countsByYear W20291213292022 @default.
- W2029121329 countsByYear W20291213292023 @default.
- W2029121329 crossrefType "journal-article" @default.
- W2029121329 hasAuthorship W2029121329A5015512495 @default.
- W2029121329 hasAuthorship W2029121329A5086773049 @default.
- W2029121329 hasAuthorship W2029121329A5087985744 @default.
- W2029121329 hasConcept C119599485 @default.
- W2029121329 hasConcept C121332964 @default.
- W2029121329 hasConcept C127413603 @default.
- W2029121329 hasConcept C157138929 @default.
- W2029121329 hasConcept C159985019 @default.
- W2029121329 hasConcept C160671074 @default.
- W2029121329 hasConcept C164292776 @default.
- W2029121329 hasConcept C165801399 @default.
- W2029121329 hasConcept C171250308 @default.
- W2029121329 hasConcept C172120300 @default.
- W2029121329 hasConcept C172707124 @default.
- W2029121329 hasConcept C192562407 @default.
- W2029121329 hasConcept C2779301550 @default.
- W2029121329 hasConcept C37977207 @default.
- W2029121329 hasConcept C49040817 @default.
- W2029121329 hasConcept C57879066 @default.
- W2029121329 hasConcept C76272257 @default.
- W2029121329 hasConcept C78519656 @default.
- W2029121329 hasConceptScore W2029121329C119599485 @default.
- W2029121329 hasConceptScore W2029121329C121332964 @default.
- W2029121329 hasConceptScore W2029121329C127413603 @default.
- W2029121329 hasConceptScore W2029121329C157138929 @default.
- W2029121329 hasConceptScore W2029121329C159985019 @default.
- W2029121329 hasConceptScore W2029121329C160671074 @default.
- W2029121329 hasConceptScore W2029121329C164292776 @default.
- W2029121329 hasConceptScore W2029121329C165801399 @default.
- W2029121329 hasConceptScore W2029121329C171250308 @default.
- W2029121329 hasConceptScore W2029121329C172120300 @default.
- W2029121329 hasConceptScore W2029121329C172707124 @default.
- W2029121329 hasConceptScore W2029121329C192562407 @default.
- W2029121329 hasConceptScore W2029121329C2779301550 @default.
- W2029121329 hasConceptScore W2029121329C37977207 @default.
- W2029121329 hasConceptScore W2029121329C49040817 @default.
- W2029121329 hasConceptScore W2029121329C57879066 @default.
- W2029121329 hasConceptScore W2029121329C76272257 @default.
- W2029121329 hasConceptScore W2029121329C78519656 @default.
- W2029121329 hasIssue "12" @default.
- W2029121329 hasLocation W20291213291 @default.
- W2029121329 hasOpenAccess W2029121329 @default.
- W2029121329 hasPrimaryLocation W20291213291 @default.
- W2029121329 hasRelatedWork W1767278808 @default.
- W2029121329 hasRelatedWork W1968460271 @default.
- W2029121329 hasRelatedWork W1982042535 @default.
- W2029121329 hasRelatedWork W2015397777 @default.
- W2029121329 hasRelatedWork W2038894038 @default.
- W2029121329 hasRelatedWork W2065125548 @default.
- W2029121329 hasRelatedWork W2105173834 @default.
- W2029121329 hasRelatedWork W2149738209 @default.
- W2029121329 hasRelatedWork W2379408043 @default.
- W2029121329 hasRelatedWork W2386332316 @default.
- W2029121329 hasVolume "15" @default.
- W2029121329 isParatext "false" @default.
- W2029121329 isRetracted "false" @default.
- W2029121329 magId "2029121329" @default.
- W2029121329 workType "article" @default.