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• W2029122629 abstract "Non-planar surface may cause incorrect transfer of patterns during lithography. In today's IC manufacturing, chemical mechanical polishing (CMP) is used for topographical planarization Since polish rates for metals and oxides are different, dummy metal fills in layout is used to minimize post-CMP thickness variability. Existing metal fill solutions target secondary goals minimizing timing and crosstalk impact. They may however reduce yield by increasing probability of failure (POF) due to particulate defects. Layout design solutions that minimize POF and also improve surface planarity via dummy fill insertions have competing requirements for line spacing. In this work, we present a formulation to balance these competing goals and provide a comparative study of greedy (or fixed spacing), variable spacing and LP formulation based fill insertions based on scalability and quality of solution. Finally, we extend the critical area based solution to include SRAF insertion in order to account for optical diffraction in lithography. The key contributions of this paper are i) layout density analysis model, ii) heuristic greedy, variable spacing and LP formulation based fill insertion techniques and iii) characterization and implementation of inter-feature spacing based SRAF insertion. Thus the proposed solution addresses both lithography and particulate related defects. Experimental results based on layout of ISCAS 85 benchmark circuits show that the variable spacing and the LP formulation based fill insertion techniques result in substantially reduced critical area while satisfying the layout density and uniformity criteria." @default.
• W2029122629 created "2016-06-24" @default.
• W2029122629 creator A5054064879 @default.
• W2029122629 creator A5089434054 @default.
• W2029122629 date "2012-03-01" @default.
• W2029122629 modified "2023-09-28" @default.
• W2029122629 title "Critical area driven dummy fill insertion to improve manufacturing yield" @default.
• W2029122629 cites W1481895108 @default.
• W2029122629 cites W1518236483 @default.
• W2029122629 cites W1964324435 @default.
• W2029122629 cites W1968111220 @default.
• W2029122629 cites W1976727896 @default.
• W2029122629 cites W1979002394 @default.
• W2029122629 cites W1994910991 @default.
• W2029122629 cites W2016700345 @default.
• W2029122629 cites W2031793959 @default.
• W2029122629 cites W2098095114 @default.
• W2029122629 cites W2098769965 @default.
• W2029122629 cites W2102658743 @default.
• W2029122629 cites W2106780604 @default.
• W2029122629 cites W2107306581 @default.
• W2029122629 cites W2113335196 @default.
• W2029122629 cites W2123131789 @default.
• W2029122629 cites W2125788370 @default.
• W2029122629 cites W2132498016 @default.
• W2029122629 cites W2132854647 @default.
• W2029122629 cites W2138834041 @default.
• W2029122629 cites W2142356306 @default.
• W2029122629 cites W2145893261 @default.
• W2029122629 cites W2149625165 @default.
• W2029122629 cites W2161615290 @default.
• W2029122629 cites W2563794588 @default.
• W2029122629 cites W3023016481 @default.
• W2029122629 doi "https://doi.org/10.1109/isqed.2012.6187514" @default.
• W2029122629 hasPublicationYear "2012" @default.
• W2029122629 type Work @default.
• W2029122629 sameAs 2029122629 @default.
• W2029122629 citedByCount "5" @default.
• W2029122629 countsByYear W20291226292014 @default.
• W2029122629 countsByYear W20291226292017 @default.
• W2029122629 countsByYear W20291226292019 @default.
• W2029122629 crossrefType "proceedings-article" @default.
• W2029122629 hasAuthorship W2029122629A5054064879 @default.
• W2029122629 hasAuthorship W2029122629A5089434054 @default.
• W2029122629 hasBestOaLocation W20291226292 @default.
• W2029122629 hasConcept C121332964 @default.
• W2029122629 hasConcept C127413603 @default.
• W2029122629 hasConcept C13280743 @default.
• W2029122629 hasConcept C138113353 @default.
• W2029122629 hasConcept C159985019 @default.
• W2029122629 hasConcept C160671074 @default.
• W2029122629 hasConcept C171250308 @default.
• W2029122629 hasConcept C180088628 @default.
• W2029122629 hasConcept C185798385 @default.
• W2029122629 hasConcept C192562407 @default.
• W2029122629 hasConcept C204223013 @default.
• W2029122629 hasConcept C205649164 @default.
• W2029122629 hasConcept C26405456 @default.
• W2029122629 hasConcept C2778530986 @default.
• W2029122629 hasConcept C41008148 @default.
• W2029122629 hasConcept C48044578 @default.
• W2029122629 hasConcept C49040817 @default.
• W2029122629 hasConcept C62064638 @default.
• W2029122629 hasConcept C62520636 @default.
• W2029122629 hasConcept C77088390 @default.
• W2029122629 hasConcept C78519656 @default.
• W2029122629 hasConcept C90327742 @default.
• W2029122629 hasConceptScore W2029122629C121332964 @default.
• W2029122629 hasConceptScore W2029122629C127413603 @default.
• W2029122629 hasConceptScore W2029122629C13280743 @default.
• W2029122629 hasConceptScore W2029122629C138113353 @default.
• W2029122629 hasConceptScore W2029122629C159985019 @default.
• W2029122629 hasConceptScore W2029122629C160671074 @default.
• W2029122629 hasConceptScore W2029122629C171250308 @default.
• W2029122629 hasConceptScore W2029122629C180088628 @default.
• W2029122629 hasConceptScore W2029122629C185798385 @default.
• W2029122629 hasConceptScore W2029122629C192562407 @default.
• W2029122629 hasConceptScore W2029122629C204223013 @default.
• W2029122629 hasConceptScore W2029122629C205649164 @default.
• W2029122629 hasConceptScore W2029122629C26405456 @default.
• W2029122629 hasConceptScore W2029122629C2778530986 @default.
• W2029122629 hasConceptScore W2029122629C41008148 @default.
• W2029122629 hasConceptScore W2029122629C48044578 @default.
• W2029122629 hasConceptScore W2029122629C49040817 @default.
• W2029122629 hasConceptScore W2029122629C62064638 @default.
• W2029122629 hasConceptScore W2029122629C62520636 @default.
• W2029122629 hasConceptScore W2029122629C77088390 @default.
• W2029122629 hasConceptScore W2029122629C78519656 @default.
• W2029122629 hasConceptScore W2029122629C90327742 @default.
• W2029122629 hasLocation W20291226291 @default.
• W2029122629 hasLocation W20291226292 @default.
• W2029122629 hasOpenAccess W2029122629 @default.
• W2029122629 hasPrimaryLocation W20291226291 @default.
• W2029122629 hasRelatedWork W1971318180 @default.
• W2029122629 hasRelatedWork W1985797976 @default.
• W2029122629 hasRelatedWork W1990330574 @default.
• W2029122629 hasRelatedWork W2017416341 @default.
• W2029122629 hasRelatedWork W2025074164 @default.
• W2029122629 hasRelatedWork W2077203087 @default.
• W2029122629 hasRelatedWork W2082909429 @default.

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