Matches in SemOpenAlex for { <https://semopenalex.org/work/W2029142716> ?p ?o ?g. }
Showing items 1 to 83 of
83
with 100 items per page.
- W2029142716 endingPage "2861" @default.
- W2029142716 startingPage "2859" @default.
- W2029142716 abstract "We describe the response of an industrial plasma reactor to excitation at varying power levels. When the reactor is excited at low power, rf voltage and current waveforms contain components at multiples of the drive frequency (13.56 MHz) due to the plasma’s nonlinear impedance. As power is increased, a transition point is reached and the waveforms change. Above the transition power level, signals at the half-harmonic frequency (6.78 MHz) and its multiples are also present, which is indicative of a period-doubling bifurcation. Above and below the bifurcation point, the dc bias and the etch rate behave quite differently." @default.
- W2029142716 created "2016-06-24" @default.
- W2029142716 creator A5040966403 @default.
- W2029142716 creator A5085329927 @default.
- W2029142716 date "1992-06-08" @default.
- W2029142716 modified "2023-10-16" @default.
- W2029142716 title "Period-doubling bifurcation in a plasma reactor" @default.
- W2029142716 cites W1985215743 @default.
- W2029142716 cites W2014720284 @default.
- W2029142716 cites W2015286120 @default.
- W2029142716 cites W2022557352 @default.
- W2029142716 cites W2034117378 @default.
- W2029142716 cites W2038118832 @default.
- W2029142716 cites W2038270970 @default.
- W2029142716 cites W2059801544 @default.
- W2029142716 cites W2062528822 @default.
- W2029142716 doi "https://doi.org/10.1063/1.106847" @default.
- W2029142716 hasPublicationYear "1992" @default.
- W2029142716 type Work @default.
- W2029142716 sameAs 2029142716 @default.
- W2029142716 citedByCount "21" @default.
- W2029142716 countsByYear W20291427162015 @default.
- W2029142716 countsByYear W20291427162016 @default.
- W2029142716 countsByYear W20291427162022 @default.
- W2029142716 countsByYear W20291427162023 @default.
- W2029142716 crossrefType "journal-article" @default.
- W2029142716 hasAuthorship W2029142716A5040966403 @default.
- W2029142716 hasAuthorship W2029142716A5085329927 @default.
- W2029142716 hasConcept C121332964 @default.
- W2029142716 hasConcept C127934551 @default.
- W2029142716 hasConcept C158622935 @default.
- W2029142716 hasConcept C163258240 @default.
- W2029142716 hasConcept C165801399 @default.
- W2029142716 hasConcept C17829176 @default.
- W2029142716 hasConcept C184779094 @default.
- W2029142716 hasConcept C185592680 @default.
- W2029142716 hasConcept C194271172 @default.
- W2029142716 hasConcept C197424946 @default.
- W2029142716 hasConcept C24890656 @default.
- W2029142716 hasConcept C2781349735 @default.
- W2029142716 hasConcept C62520636 @default.
- W2029142716 hasConcept C82706917 @default.
- W2029142716 hasConcept C83581075 @default.
- W2029142716 hasConcept C85075877 @default.
- W2029142716 hasConcept C97355855 @default.
- W2029142716 hasConceptScore W2029142716C121332964 @default.
- W2029142716 hasConceptScore W2029142716C127934551 @default.
- W2029142716 hasConceptScore W2029142716C158622935 @default.
- W2029142716 hasConceptScore W2029142716C163258240 @default.
- W2029142716 hasConceptScore W2029142716C165801399 @default.
- W2029142716 hasConceptScore W2029142716C17829176 @default.
- W2029142716 hasConceptScore W2029142716C184779094 @default.
- W2029142716 hasConceptScore W2029142716C185592680 @default.
- W2029142716 hasConceptScore W2029142716C194271172 @default.
- W2029142716 hasConceptScore W2029142716C197424946 @default.
- W2029142716 hasConceptScore W2029142716C24890656 @default.
- W2029142716 hasConceptScore W2029142716C2781349735 @default.
- W2029142716 hasConceptScore W2029142716C62520636 @default.
- W2029142716 hasConceptScore W2029142716C82706917 @default.
- W2029142716 hasConceptScore W2029142716C83581075 @default.
- W2029142716 hasConceptScore W2029142716C85075877 @default.
- W2029142716 hasConceptScore W2029142716C97355855 @default.
- W2029142716 hasIssue "23" @default.
- W2029142716 hasLocation W20291427161 @default.
- W2029142716 hasOpenAccess W2029142716 @default.
- W2029142716 hasPrimaryLocation W20291427161 @default.
- W2029142716 hasRelatedWork W1056484565 @default.
- W2029142716 hasRelatedWork W1997086491 @default.
- W2029142716 hasRelatedWork W2014696479 @default.
- W2029142716 hasRelatedWork W2093026952 @default.
- W2029142716 hasRelatedWork W2108430337 @default.
- W2029142716 hasRelatedWork W2364173323 @default.
- W2029142716 hasRelatedWork W2556597813 @default.
- W2029142716 hasRelatedWork W2639033224 @default.
- W2029142716 hasRelatedWork W4214875847 @default.
- W2029142716 hasRelatedWork W4362714784 @default.
- W2029142716 hasVolume "60" @default.
- W2029142716 isParatext "false" @default.
- W2029142716 isRetracted "false" @default.
- W2029142716 magId "2029142716" @default.
- W2029142716 workType "article" @default.