FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2029176235> ?p ?o ?g. }

• W2029176235 endingPage "2844" @default.
• W2029176235 startingPage "2842" @default.
• W2029176235 abstract "Copper films have been deposited by low pressure chemical vapor deposition from mixtures of the Cu+1 precursor copper hexafluoroacetylacetonate vinyltrimethylsilane and water vapor. The addition of water vapor at the optimum concentration more than doubles the deposition rate and substantially reduces the nucleation time without adversely affecting the copper film resistivity, but excess amounts of water vapor significantly increase the copper resistivity. Auger electron spectroscopy analysis detects no impurities in copper films deposited under optimum water conditions, but detects oxygen in films deposited under excess water conditions, suggesting copper oxide formation." @default.
• W2029176235 created "2016-06-24" @default.
• W2029176235 creator A5023012751 @default.
• W2029176235 creator A5045742330 @default.
• W2029176235 creator A5052212295 @default.
• W2029176235 creator A5090008357 @default.
• W2029176235 date "1993-11-15" @default.
• W2029176235 modified "2023-09-26" @default.
• W2029176235 title "Chemical vapor deposition of copper from Cu⁺¹precursors in the presence of water vapor" @default.
• W2029176235 cites W1598672916 @default.
• W2029176235 cites W1974602296 @default.
• W2029176235 cites W1990679756 @default.
• W2029176235 cites W2026624636 @default.
• W2029176235 cites W2033906886 @default.
• W2029176235 cites W2073482310 @default.
• W2029176235 cites W2167914207 @default.
• W2029176235 cites W2170148277 @default.
• W2029176235 cites W2949604916 @default.
• W2029176235 doi "https://doi.org/10.1063/1.110304" @default.
• W2029176235 hasPublicationYear "1993" @default.
• W2029176235 type Work @default.
• W2029176235 sameAs 2029176235 @default.
• W2029176235 citedByCount "59" @default.
• W2029176235 countsByYear W20291762352013 @default.
• W2029176235 countsByYear W20291762352015 @default.
• W2029176235 countsByYear W20291762352016 @default.
• W2029176235 countsByYear W20291762352021 @default.
• W2029176235 countsByYear W20291762352022 @default.
• W2029176235 crossrefType "journal-article" @default.
• W2029176235 hasAuthorship W2029176235A5023012751 @default.
• W2029176235 hasAuthorship W2029176235A5045742330 @default.
• W2029176235 hasAuthorship W2029176235A5052212295 @default.
• W2029176235 hasAuthorship W2029176235A5090008357 @default.
• W2029176235 hasConcept C107872376 @default.
• W2029176235 hasConcept C111548154 @default.
• W2029176235 hasConcept C113196181 @default.
• W2029176235 hasConcept C119599485 @default.
• W2029176235 hasConcept C121332964 @default.
• W2029176235 hasConcept C127413603 @default.
• W2029176235 hasConcept C147534773 @default.
• W2029176235 hasConcept C151730666 @default.
• W2029176235 hasConcept C171250308 @default.
• W2029176235 hasConcept C178790620 @default.
• W2029176235 hasConcept C179104552 @default.
• W2029176235 hasConcept C183866003 @default.
• W2029176235 hasConcept C185544564 @default.
• W2029176235 hasConcept C185592680 @default.
• W2029176235 hasConcept C19067145 @default.
• W2029176235 hasConcept C191897082 @default.
• W2029176235 hasConcept C192562407 @default.
• W2029176235 hasConcept C25442681 @default.
• W2029176235 hasConcept C2816523 @default.
• W2029176235 hasConcept C544778455 @default.
• W2029176235 hasConcept C57410435 @default.
• W2029176235 hasConcept C61048295 @default.
• W2029176235 hasConcept C64297162 @default.
• W2029176235 hasConcept C69990965 @default.
• W2029176235 hasConcept C71987851 @default.
• W2029176235 hasConcept C75937256 @default.
• W2029176235 hasConcept C86803240 @default.
• W2029176235 hasConceptScore W2029176235C107872376 @default.
• W2029176235 hasConceptScore W2029176235C111548154 @default.
• W2029176235 hasConceptScore W2029176235C113196181 @default.
• W2029176235 hasConceptScore W2029176235C119599485 @default.
• W2029176235 hasConceptScore W2029176235C121332964 @default.
• W2029176235 hasConceptScore W2029176235C127413603 @default.
• W2029176235 hasConceptScore W2029176235C147534773 @default.
• W2029176235 hasConceptScore W2029176235C151730666 @default.
• W2029176235 hasConceptScore W2029176235C171250308 @default.
• W2029176235 hasConceptScore W2029176235C178790620 @default.
• W2029176235 hasConceptScore W2029176235C179104552 @default.
• W2029176235 hasConceptScore W2029176235C183866003 @default.
• W2029176235 hasConceptScore W2029176235C185544564 @default.
• W2029176235 hasConceptScore W2029176235C185592680 @default.
• W2029176235 hasConceptScore W2029176235C19067145 @default.
• W2029176235 hasConceptScore W2029176235C191897082 @default.
• W2029176235 hasConceptScore W2029176235C192562407 @default.
• W2029176235 hasConceptScore W2029176235C25442681 @default.
• W2029176235 hasConceptScore W2029176235C2816523 @default.
• W2029176235 hasConceptScore W2029176235C544778455 @default.
• W2029176235 hasConceptScore W2029176235C57410435 @default.
• W2029176235 hasConceptScore W2029176235C61048295 @default.
• W2029176235 hasConceptScore W2029176235C64297162 @default.
• W2029176235 hasConceptScore W2029176235C69990965 @default.
• W2029176235 hasConceptScore W2029176235C71987851 @default.
• W2029176235 hasConceptScore W2029176235C75937256 @default.
• W2029176235 hasConceptScore W2029176235C86803240 @default.
• W2029176235 hasIssue "20" @default.
• W2029176235 hasLocation W20291762351 @default.
• W2029176235 hasOpenAccess W2029176235 @default.
• W2029176235 hasPrimaryLocation W20291762351 @default.
• W2029176235 hasRelatedWork W1972346454 @default.
• W2029176235 hasRelatedWork W2000652296 @default.
• W2029176235 hasRelatedWork W2029176235 @default.
• W2029176235 hasRelatedWork W2316536896 @default.
• W2029176235 hasRelatedWork W2355628311 @default.
• W2029176235 hasRelatedWork W2600395869 @default.
• W2029176235 hasRelatedWork W3150710940 @default.

• next