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- W2029179982 abstract "This paper takes a look at the evolution of lithography during the last 50 years and projects its future beyond the era of Next Generation Lithography (NGL). The technologies beyond NGL will require a paradigm shift from the way things are done today. Many new disciplines and processes will emerge that will need to be integrated into existing systems and procedures." @default.
- W2029179982 created "2016-06-24" @default.
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- W2029179982 date "2002-07-05" @default.
- W2029179982 modified "2023-09-26" @default.
- W2029179982 title "Lithography: a historical perspective and shape of things to come" @default.
- W2029179982 doi "https://doi.org/10.1117/12.472355" @default.
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