Matches in SemOpenAlex for { <https://semopenalex.org/work/W2029185679> ?p ?o ?g. }
Showing items 1 to 98 of
98
with 100 items per page.
- W2029185679 endingPage "36" @default.
- W2029185679 startingPage "30" @default.
- W2029185679 abstract "The internal stress and stress gradient of thick () and thin () polysilicon films were evaluated with surface micromachined test structures. The structure that measured internal stress consisted of actuator beams rotating an indicator through an angle corresponding to the stress. The indicator deflection was measured in an SEM. Finite element analysis (FEA) was used both to optimize the design and to calibrate the structure. A folded beam design was used to minimize the total area the structure occupied so that it could be incorporated in the wafer layout of other surface micromachined details, and used for online process diagnostics. The indicator was provided with a Vernier scale to facilitate quick evaluation in an optimal microscope. The stress gradient was measured from the deflection of long () cantilever beams. The deflection was measured in an optical microscope and the output was calibrated with FEA calculations." @default.
- W2029185679 created "2016-06-24" @default.
- W2029185679 creator A5004468544 @default.
- W2029185679 creator A5016679981 @default.
- W2029185679 creator A5062774062 @default.
- W2029185679 creator A5074244147 @default.
- W2029185679 date "1997-03-01" @default.
- W2029185679 modified "2023-09-24" @default.
- W2029185679 title "High-sensitivity surface micromachined structures for internal stress and stress gradient evaluation" @default.
- W2029185679 cites W1966797992 @default.
- W2029185679 cites W1969448236 @default.
- W2029185679 cites W2028315895 @default.
- W2029185679 cites W2043397397 @default.
- W2029185679 cites W4232648257 @default.
- W2029185679 doi "https://doi.org/10.1088/0960-1317/7/1/006" @default.
- W2029185679 hasPublicationYear "1997" @default.
- W2029185679 type Work @default.
- W2029185679 sameAs 2029185679 @default.
- W2029185679 citedByCount "71" @default.
- W2029185679 countsByYear W20291856792012 @default.
- W2029185679 countsByYear W20291856792013 @default.
- W2029185679 countsByYear W20291856792014 @default.
- W2029185679 countsByYear W20291856792015 @default.
- W2029185679 countsByYear W20291856792016 @default.
- W2029185679 countsByYear W20291856792017 @default.
- W2029185679 countsByYear W20291856792018 @default.
- W2029185679 countsByYear W20291856792019 @default.
- W2029185679 countsByYear W20291856792020 @default.
- W2029185679 countsByYear W20291856792021 @default.
- W2029185679 countsByYear W20291856792022 @default.
- W2029185679 crossrefType "journal-article" @default.
- W2029185679 hasAuthorship W2029185679A5004468544 @default.
- W2029185679 hasAuthorship W2029185679A5016679981 @default.
- W2029185679 hasAuthorship W2029185679A5062774062 @default.
- W2029185679 hasAuthorship W2029185679A5074244147 @default.
- W2029185679 hasConcept C120665830 @default.
- W2029185679 hasConcept C121332964 @default.
- W2029185679 hasConcept C127413603 @default.
- W2029185679 hasConcept C135628077 @default.
- W2029185679 hasConcept C136525101 @default.
- W2029185679 hasConcept C138885662 @default.
- W2029185679 hasConcept C141354745 @default.
- W2029185679 hasConcept C142724271 @default.
- W2029185679 hasConcept C145667562 @default.
- W2029185679 hasConcept C159985019 @default.
- W2029185679 hasConcept C160671074 @default.
- W2029185679 hasConcept C192562407 @default.
- W2029185679 hasConcept C204787440 @default.
- W2029185679 hasConcept C21036866 @default.
- W2029185679 hasConcept C2781355719 @default.
- W2029185679 hasConcept C2988361403 @default.
- W2029185679 hasConcept C41895202 @default.
- W2029185679 hasConcept C49040817 @default.
- W2029185679 hasConcept C66938386 @default.
- W2029185679 hasConcept C67649825 @default.
- W2029185679 hasConcept C71924100 @default.
- W2029185679 hasConceptScore W2029185679C120665830 @default.
- W2029185679 hasConceptScore W2029185679C121332964 @default.
- W2029185679 hasConceptScore W2029185679C127413603 @default.
- W2029185679 hasConceptScore W2029185679C135628077 @default.
- W2029185679 hasConceptScore W2029185679C136525101 @default.
- W2029185679 hasConceptScore W2029185679C138885662 @default.
- W2029185679 hasConceptScore W2029185679C141354745 @default.
- W2029185679 hasConceptScore W2029185679C142724271 @default.
- W2029185679 hasConceptScore W2029185679C145667562 @default.
- W2029185679 hasConceptScore W2029185679C159985019 @default.
- W2029185679 hasConceptScore W2029185679C160671074 @default.
- W2029185679 hasConceptScore W2029185679C192562407 @default.
- W2029185679 hasConceptScore W2029185679C204787440 @default.
- W2029185679 hasConceptScore W2029185679C21036866 @default.
- W2029185679 hasConceptScore W2029185679C2781355719 @default.
- W2029185679 hasConceptScore W2029185679C2988361403 @default.
- W2029185679 hasConceptScore W2029185679C41895202 @default.
- W2029185679 hasConceptScore W2029185679C49040817 @default.
- W2029185679 hasConceptScore W2029185679C66938386 @default.
- W2029185679 hasConceptScore W2029185679C67649825 @default.
- W2029185679 hasConceptScore W2029185679C71924100 @default.
- W2029185679 hasIssue "1" @default.
- W2029185679 hasLocation W20291856791 @default.
- W2029185679 hasOpenAccess W2029185679 @default.
- W2029185679 hasPrimaryLocation W20291856791 @default.
- W2029185679 hasRelatedWork W123121913 @default.
- W2029185679 hasRelatedWork W2029185679 @default.
- W2029185679 hasRelatedWork W2053540745 @default.
- W2029185679 hasRelatedWork W2069744136 @default.
- W2029185679 hasRelatedWork W2105225674 @default.
- W2029185679 hasRelatedWork W2353912871 @default.
- W2029185679 hasRelatedWork W2358544540 @default.
- W2029185679 hasRelatedWork W2902100407 @default.
- W2029185679 hasRelatedWork W4307292228 @default.
- W2029185679 hasRelatedWork W4385755065 @default.
- W2029185679 hasVolume "7" @default.
- W2029185679 isParatext "false" @default.
- W2029185679 isRetracted "false" @default.
- W2029185679 magId "2029185679" @default.
- W2029185679 workType "article" @default.