FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2029221103> ?p ?o ?g. }

• W2029221103 endingPage "5474" @default.
• W2029221103 startingPage "5470" @default.
• W2029221103 abstract "Structural and electrical properties of plasma-deposited silicon nitride (SiN) have been investigated. The compositional ratio of Si to N estimated by Auger analysis is found to be uniform in the direction of the film thickness. The numbers of Si-H and N-H bonds of the order of ∼1021/cm3 have been obtained by calculating the vibrational spectra. The two types of trapping states which are responsible for the Poole-Frenkel conduction are found in SiN from the current DLTS measurement. The barrier height at the SiN/Si interface determined by the internal photoemission ranges from 1.7 to 2.5 eV, being dependent on the film thickness. From these results, current transport mechanisms through SiN films are quantitatively discussed, and it is demonstrated that the carrier transport is dominated by the Fowler-Nordheim tunneling at low temperatures and by the Poole-Frenkel conduction at high temperatures." @default.
• W2029221103 created "2016-06-24" @default.
• W2029221103 creator A5010741341 @default.
• W2029221103 creator A5031101359 @default.
• W2029221103 creator A5063571591 @default.
• W2029221103 creator A5064562385 @default.
• W2029221103 creator A5065527039 @default.
• W2029221103 creator A5068608208 @default.
• W2029221103 date "1980-10-01" @default.
• W2029221103 modified "2023-10-17" @default.
• W2029221103 title "Characterization of plasma-deposited silicon nitride films" @default.
• W2029221103 cites W1490077279 @default.
• W2029221103 cites W1972879459 @default.
• W2029221103 cites W2031882613 @default.
• W2029221103 cites W2038106172 @default.
• W2029221103 cites W2043794154 @default.
• W2029221103 cites W2048049771 @default.
• W2029221103 cites W2058289256 @default.
• W2029221103 cites W2061241060 @default.
• W2029221103 cites W2065073135 @default.
• W2029221103 cites W2091681409 @default.
• W2029221103 doi "https://doi.org/10.1063/1.327505" @default.
• W2029221103 hasPublicationYear "1980" @default.
• W2029221103 type Work @default.
• W2029221103 sameAs 2029221103 @default.
• W2029221103 citedByCount "42" @default.
• W2029221103 countsByYear W20292211032013 @default.
• W2029221103 countsByYear W20292211032014 @default.
• W2029221103 crossrefType "journal-article" @default.
• W2029221103 hasAuthorship W2029221103A5010741341 @default.
• W2029221103 hasAuthorship W2029221103A5031101359 @default.
• W2029221103 hasAuthorship W2029221103A5063571591 @default.
• W2029221103 hasAuthorship W2029221103A5064562385 @default.
• W2029221103 hasAuthorship W2029221103A5065527039 @default.
• W2029221103 hasAuthorship W2029221103A5068608208 @default.
• W2029221103 hasConcept C113196181 @default.
• W2029221103 hasConcept C119599485 @default.
• W2029221103 hasConcept C120398109 @default.
• W2029221103 hasConcept C121332964 @default.
• W2029221103 hasConcept C127396331 @default.
• W2029221103 hasConcept C127413603 @default.
• W2029221103 hasConcept C159985019 @default.
• W2029221103 hasConcept C171250308 @default.
• W2029221103 hasConcept C172100665 @default.
• W2029221103 hasConcept C184779094 @default.
• W2029221103 hasConcept C185592680 @default.
• W2029221103 hasConcept C18903297 @default.
• W2029221103 hasConcept C192562407 @default.
• W2029221103 hasConcept C194760766 @default.
• W2029221103 hasConcept C26873012 @default.
• W2029221103 hasConcept C2777431650 @default.
• W2029221103 hasConcept C2777924906 @default.
• W2029221103 hasConcept C2779227376 @default.
• W2029221103 hasConcept C2780646311 @default.
• W2029221103 hasConcept C43617362 @default.
• W2029221103 hasConcept C49040817 @default.
• W2029221103 hasConcept C544956773 @default.
• W2029221103 hasConcept C62520636 @default.
• W2029221103 hasConcept C69990965 @default.
• W2029221103 hasConcept C82706917 @default.
• W2029221103 hasConcept C86803240 @default.
• W2029221103 hasConceptScore W2029221103C113196181 @default.
• W2029221103 hasConceptScore W2029221103C119599485 @default.
• W2029221103 hasConceptScore W2029221103C120398109 @default.
• W2029221103 hasConceptScore W2029221103C121332964 @default.
• W2029221103 hasConceptScore W2029221103C127396331 @default.
• W2029221103 hasConceptScore W2029221103C127413603 @default.
• W2029221103 hasConceptScore W2029221103C159985019 @default.
• W2029221103 hasConceptScore W2029221103C171250308 @default.
• W2029221103 hasConceptScore W2029221103C172100665 @default.
• W2029221103 hasConceptScore W2029221103C184779094 @default.
• W2029221103 hasConceptScore W2029221103C185592680 @default.
• W2029221103 hasConceptScore W2029221103C18903297 @default.
• W2029221103 hasConceptScore W2029221103C192562407 @default.
• W2029221103 hasConceptScore W2029221103C194760766 @default.
• W2029221103 hasConceptScore W2029221103C26873012 @default.
• W2029221103 hasConceptScore W2029221103C2777431650 @default.
• W2029221103 hasConceptScore W2029221103C2777924906 @default.
• W2029221103 hasConceptScore W2029221103C2779227376 @default.
• W2029221103 hasConceptScore W2029221103C2780646311 @default.
• W2029221103 hasConceptScore W2029221103C43617362 @default.
• W2029221103 hasConceptScore W2029221103C49040817 @default.
• W2029221103 hasConceptScore W2029221103C544956773 @default.
• W2029221103 hasConceptScore W2029221103C62520636 @default.
• W2029221103 hasConceptScore W2029221103C69990965 @default.
• W2029221103 hasConceptScore W2029221103C82706917 @default.
• W2029221103 hasConceptScore W2029221103C86803240 @default.
• W2029221103 hasIssue "10" @default.
• W2029221103 hasLocation W20292211031 @default.
• W2029221103 hasOpenAccess W2029221103 @default.
• W2029221103 hasPrimaryLocation W20292211031 @default.
• W2029221103 hasRelatedWork W1521559836 @default.
• W2029221103 hasRelatedWork W1993896417 @default.
• W2029221103 hasRelatedWork W2006846697 @default.
• W2029221103 hasRelatedWork W2020082095 @default.
• W2029221103 hasRelatedWork W2022667295 @default.
• W2029221103 hasRelatedWork W2053542887 @default.
• W2029221103 hasRelatedWork W2088200359 @default.

• next