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- W2029233204 abstract "Porous insulators are utilized in the wiring structure of microelectronic devices as a means of reducing, through low dielectric permittivity, power consumption and signal delay in integrated circuits. They are typically based on low density modifications of amorphous SiO2 known as SiCOH or carbon-doped oxides, in which free volume is created through the removal of labile organic phases. Porous dielectrics pose a number of technological challenges related to chemical and mechanical stability, particularly in regard to semiconductor processing methods. This review discusses porous dielectric film preparation techniques, key issues encountered, and mitigation strategies." @default.
- W2029233204 created "2016-06-24" @default.
- W2029233204 creator A5074754779 @default.
- W2029233204 date "2010-01-18" @default.
- W2029233204 modified "2023-09-23" @default.
- W2029233204 title "Porous Dielectrics in Microelectronic Wiring Applications" @default.
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- W2029233204 doi "https://doi.org/10.3390/ma3010536" @default.
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