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- W2029355259 abstract "Oriented superconducting YBa2Cu3O7 thin films were deposited on yttria stabilized zirconia and SrTiO3 substrates by ion-beam sputtering of a nonstoichiometric oxide target. The films exhibited zero-resistance critical temperatures as high as 83.5 K without post-deposition anneals. Both the deposition rate and the c-lattice parameter data displayed two distinct regimes of dependence on the beam power of the ion source. Low-power sputtering yielded films with large c-dimensions and low Tc’s. Higher-power sputtering produced a continuous decrease in the c-lattice parameter and increase in critical temperature. Films having the smaller c-lattice parameters were Cu rich. The Cu content of films deposited at beam voltages of 800 V and above increased with increasing beam power." @default.
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- W2029355259 date "1990-05-15" @default.
- W2029355259 modified "2023-10-16" @default.
- W2029355259 title "Ion beam sputtering of <i>i</i> <i>n</i> <i>s</i> <i>i</i> <i>t</i> <i>u</i> superconducting Y-Ba-Cu-O films" @default.
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- W2029355259 doi "https://doi.org/10.1063/1.345161" @default.
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