Matches in SemOpenAlex for { <https://semopenalex.org/work/W2029366532> ?p ?o ?g. }
Showing items 1 to 95 of
95
with 100 items per page.
- W2029366532 abstract "For full commercialization, extreme ultraviolet lithography (EUVL) technology requires the availability of EUV mask blanks that are free of defects. This remains one of the main impediments to the implementation of EUV at the 22 nm node and beyond. Consensus is building that a few small defects can be mitigated during mask patterning, but defects over 100 nm (SiO2 equivalent) in size are considered potential “killer” defects or defects large enough that the mask blank would not be usable. The current defect performance of the ion beam sputter deposition (IBD) tool will be discussed and the progress achieved to date in the reduction of large size defects will be summarized, including a description of the main sources of defects and their composition." @default.
- W2029366532 created "2016-06-24" @default.
- W2029366532 creator A5003958683 @default.
- W2029366532 creator A5023194541 @default.
- W2029366532 creator A5056205477 @default.
- W2029366532 creator A5057318605 @default.
- W2029366532 creator A5062674839 @default.
- W2029366532 creator A5064035976 @default.
- W2029366532 creator A5064552593 @default.
- W2029366532 creator A5091429063 @default.
- W2029366532 creator A5091505077 @default.
- W2029366532 date "2014-04-17" @default.
- W2029366532 modified "2023-09-27" @default.
- W2029366532 title "Production of EUV mask blanks with low killer defects" @default.
- W2029366532 cites W1994932746 @default.
- W2029366532 cites W2041293246 @default.
- W2029366532 cites W2130217762 @default.
- W2029366532 doi "https://doi.org/10.1117/12.2048541" @default.
- W2029366532 hasPublicationYear "2014" @default.
- W2029366532 type Work @default.
- W2029366532 sameAs 2029366532 @default.
- W2029366532 citedByCount "4" @default.
- W2029366532 countsByYear W20293665322014 @default.
- W2029366532 countsByYear W20293665322015 @default.
- W2029366532 crossrefType "proceedings-article" @default.
- W2029366532 hasAuthorship W2029366532A5003958683 @default.
- W2029366532 hasAuthorship W2029366532A5023194541 @default.
- W2029366532 hasAuthorship W2029366532A5056205477 @default.
- W2029366532 hasAuthorship W2029366532A5057318605 @default.
- W2029366532 hasAuthorship W2029366532A5062674839 @default.
- W2029366532 hasAuthorship W2029366532A5064035976 @default.
- W2029366532 hasAuthorship W2029366532A5064552593 @default.
- W2029366532 hasAuthorship W2029366532A5091429063 @default.
- W2029366532 hasAuthorship W2029366532A5091505077 @default.
- W2029366532 hasConcept C120665830 @default.
- W2029366532 hasConcept C121332964 @default.
- W2029366532 hasConcept C136764020 @default.
- W2029366532 hasConcept C146024833 @default.
- W2029366532 hasConcept C159985019 @default.
- W2029366532 hasConcept C162996421 @default.
- W2029366532 hasConcept C171250308 @default.
- W2029366532 hasConcept C177409738 @default.
- W2029366532 hasConcept C17744445 @default.
- W2029366532 hasConcept C19067145 @default.
- W2029366532 hasConcept C192562407 @default.
- W2029366532 hasConcept C199539241 @default.
- W2029366532 hasConcept C204223013 @default.
- W2029366532 hasConcept C22423302 @default.
- W2029366532 hasConcept C2778089247 @default.
- W2029366532 hasConcept C2779227376 @default.
- W2029366532 hasConcept C2780615836 @default.
- W2029366532 hasConcept C2780625559 @default.
- W2029366532 hasConcept C41008148 @default.
- W2029366532 hasConcept C49040817 @default.
- W2029366532 hasConcept C520434653 @default.
- W2029366532 hasConcept C53524968 @default.
- W2029366532 hasConceptScore W2029366532C120665830 @default.
- W2029366532 hasConceptScore W2029366532C121332964 @default.
- W2029366532 hasConceptScore W2029366532C136764020 @default.
- W2029366532 hasConceptScore W2029366532C146024833 @default.
- W2029366532 hasConceptScore W2029366532C159985019 @default.
- W2029366532 hasConceptScore W2029366532C162996421 @default.
- W2029366532 hasConceptScore W2029366532C171250308 @default.
- W2029366532 hasConceptScore W2029366532C177409738 @default.
- W2029366532 hasConceptScore W2029366532C17744445 @default.
- W2029366532 hasConceptScore W2029366532C19067145 @default.
- W2029366532 hasConceptScore W2029366532C192562407 @default.
- W2029366532 hasConceptScore W2029366532C199539241 @default.
- W2029366532 hasConceptScore W2029366532C204223013 @default.
- W2029366532 hasConceptScore W2029366532C22423302 @default.
- W2029366532 hasConceptScore W2029366532C2778089247 @default.
- W2029366532 hasConceptScore W2029366532C2779227376 @default.
- W2029366532 hasConceptScore W2029366532C2780615836 @default.
- W2029366532 hasConceptScore W2029366532C2780625559 @default.
- W2029366532 hasConceptScore W2029366532C41008148 @default.
- W2029366532 hasConceptScore W2029366532C49040817 @default.
- W2029366532 hasConceptScore W2029366532C520434653 @default.
- W2029366532 hasConceptScore W2029366532C53524968 @default.
- W2029366532 hasLocation W20293665321 @default.
- W2029366532 hasOpenAccess W2029366532 @default.
- W2029366532 hasPrimaryLocation W20293665321 @default.
- W2029366532 hasRelatedWork W2009433659 @default.
- W2029366532 hasRelatedWork W2022005951 @default.
- W2029366532 hasRelatedWork W2026405817 @default.
- W2029366532 hasRelatedWork W2077278869 @default.
- W2029366532 hasRelatedWork W2083899221 @default.
- W2029366532 hasRelatedWork W2089259287 @default.
- W2029366532 hasRelatedWork W2104684732 @default.
- W2029366532 hasRelatedWork W2975407915 @default.
- W2029366532 hasRelatedWork W3053914760 @default.
- W2029366532 hasRelatedWork W4205355031 @default.
- W2029366532 isParatext "false" @default.
- W2029366532 isRetracted "false" @default.
- W2029366532 magId "2029366532" @default.
- W2029366532 workType "article" @default.