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- W2029385062 abstract "In our study, the dielectric properties of SiOC low k thin film derived from polyphenylcarbosilane were investigated as a potential interlayer dielectrics for Cu interconnect technology. A SiOC low k thin film was fabricated onto a n-type silicon wafer by dip coating using 30wt % polyphenylcarbosilane in cyclohexane. Curing of the film was performed in air at 300°C for 2h. The thickness of the film ranges from 1 μm to 1.7 μm. The dielectric constant was determined from the capacitance data obtained from metal/polyphenylcarbosilane/conductive Si MIM capacitors and shows a dielectric constant as low as 3.26 without porosity added. The SiOC low k thin film derived from polyphenylcarbosilane shows promising application as an interlayer dielectrics for Cu interconnect technology." @default.
- W2029385062 created "2016-06-24" @default.
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- W2029385062 date "2010-05-01" @default.
- W2029385062 modified "2023-09-26" @default.
- W2029385062 title "Preparation of Nano Structured SiOC Thin Film for Low k Application" @default.
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- W2029385062 doi "https://doi.org/10.4028/www.scientific.net/jnanor.11.85" @default.
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