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• W2029421625 endingPage "136" @default.
• W2029421625 startingPage "132" @default.
• W2029421625 abstract "X-ray diffraction and reflectivity, X-ray photoelectron spectroscopy and spectroscopic ellipsometry were applied to study the initial composition, thickness, lattice structure and refractive index of ‘fresh’ and annealed thin SiOx films (∼15 nm) on crystalline silicon substrates, prepared by thermal evaporation of SiO in vacuum. It has been ascertained that the film thickness and composition (x = 1.3) of the ‘fresh’ films are very close to the values set during the deposition. It has been shown that furnace annealing of the films at 1000 °C causes phase separation, film densification and small modification of the Si–SiOx interface. Transmission electron microscopy results have proven that a self-assembling process leads to formation of Si nanocrystals with a diameter of ∼4–5 nm and to epitaxial overgrowth of the Si substrate, increasing the c-Si/SiOx interface transition region to 6–7 monolayers. The nanocrystals are randomly distributed in an amorphous SiO2 matrix being closer to the Si–SiOx interface. Formation of tunnel oxide layer with a thickness of 3–5 nm has been found upon annealing. Clockwise hysteresis has been observed in the capacitance-voltage characteristics measured which has been explained by assuming charging and discharging of the nanocrystals with holes, which tunnel from the Si substrate." @default.
• W2029421625 created "2016-06-24" @default.
• W2029421625 creator A5010177657 @default.
• W2029421625 creator A5010207169 @default.
• W2029421625 creator A5022976340 @default.
• W2029421625 creator A5032867405 @default.
• W2029421625 creator A5042776546 @default.
• W2029421625 creator A5055279981 @default.
• W2029421625 creator A5061412852 @default.
• W2029421625 creator A5065919951 @default.
• W2029421625 creator A5069497115 @default.
• W2029421625 creator A5018356013 @default.
• W2029421625 creator A5056479099 @default.
• W2029421625 date "2010-10-01" @default.
• W2029421625 modified "2023-10-09" @default.
• W2029421625 title "Microstructural characterization of thin SiOx films obtained by physical vapor deposition" @default.
• W2029421625 cites W1965757010 @default.
• W2029421625 cites W1968946015 @default.
• W2029421625 cites W1985944969 @default.
• W2029421625 cites W1988595126 @default.
• W2029421625 cites W2010549511 @default.
• W2029421625 cites W2021122851 @default.
• W2029421625 cites W2048298830 @default.
• W2029421625 cites W2050460433 @default.
• W2029421625 cites W2053516861 @default.
• W2029421625 cites W2076772296 @default.
• W2029421625 cites W2140127807 @default.
• W2029421625 doi "https://doi.org/10.1016/j.mseb.2010.03.007" @default.
• W2029421625 hasPublicationYear "2010" @default.
• W2029421625 type Work @default.
• W2029421625 sameAs 2029421625 @default.
• W2029421625 citedByCount "21" @default.
• W2029421625 countsByYear W20294216252012 @default.
• W2029421625 countsByYear W20294216252013 @default.
• W2029421625 countsByYear W20294216252014 @default.
• W2029421625 countsByYear W20294216252015 @default.
• W2029421625 countsByYear W20294216252017 @default.
• W2029421625 countsByYear W20294216252018 @default.
• W2029421625 countsByYear W20294216252019 @default.
• W2029421625 countsByYear W20294216252020 @default.
• W2029421625 crossrefType "journal-article" @default.
• W2029421625 hasAuthorship W2029421625A5010177657 @default.
• W2029421625 hasAuthorship W2029421625A5010207169 @default.
• W2029421625 hasAuthorship W2029421625A5018356013 @default.
• W2029421625 hasAuthorship W2029421625A5022976340 @default.
• W2029421625 hasAuthorship W2029421625A5032867405 @default.
• W2029421625 hasAuthorship W2029421625A5042776546 @default.
• W2029421625 hasAuthorship W2029421625A5055279981 @default.
• W2029421625 hasAuthorship W2029421625A5056479099 @default.
• W2029421625 hasAuthorship W2029421625A5061412852 @default.
• W2029421625 hasAuthorship W2029421625A5065919951 @default.
• W2029421625 hasAuthorship W2029421625A5069497115 @default.
• W2029421625 hasConcept C110738630 @default.
• W2029421625 hasConcept C113196181 @default.
• W2029421625 hasConcept C127413603 @default.
• W2029421625 hasConcept C146088050 @default.
• W2029421625 hasConcept C159985019 @default.
• W2029421625 hasConcept C171250308 @default.
• W2029421625 hasConcept C175708663 @default.
• W2029421625 hasConcept C18293161 @default.
• W2029421625 hasConcept C185592680 @default.
• W2029421625 hasConcept C19067145 @default.
• W2029421625 hasConcept C192562407 @default.
• W2029421625 hasConcept C2777431650 @default.
• W2029421625 hasConcept C2777855556 @default.
• W2029421625 hasConcept C2779105228 @default.
• W2029421625 hasConcept C2779227376 @default.
• W2029421625 hasConcept C42360764 @default.
• W2029421625 hasConcept C43617362 @default.
• W2029421625 hasConcept C49040817 @default.
• W2029421625 hasConcept C544956773 @default.
• W2029421625 hasConcept C56052488 @default.
• W2029421625 hasConcept C7070889 @default.
• W2029421625 hasConcept C8010536 @default.
• W2029421625 hasConceptScore W2029421625C110738630 @default.
• W2029421625 hasConceptScore W2029421625C113196181 @default.
• W2029421625 hasConceptScore W2029421625C127413603 @default.
• W2029421625 hasConceptScore W2029421625C146088050 @default.
• W2029421625 hasConceptScore W2029421625C159985019 @default.
• W2029421625 hasConceptScore W2029421625C171250308 @default.
• W2029421625 hasConceptScore W2029421625C175708663 @default.
• W2029421625 hasConceptScore W2029421625C18293161 @default.
• W2029421625 hasConceptScore W2029421625C185592680 @default.
• W2029421625 hasConceptScore W2029421625C19067145 @default.
• W2029421625 hasConceptScore W2029421625C192562407 @default.
• W2029421625 hasConceptScore W2029421625C2777431650 @default.
• W2029421625 hasConceptScore W2029421625C2777855556 @default.
• W2029421625 hasConceptScore W2029421625C2779105228 @default.
• W2029421625 hasConceptScore W2029421625C2779227376 @default.
• W2029421625 hasConceptScore W2029421625C42360764 @default.
• W2029421625 hasConceptScore W2029421625C43617362 @default.
• W2029421625 hasConceptScore W2029421625C49040817 @default.
• W2029421625 hasConceptScore W2029421625C544956773 @default.
• W2029421625 hasConceptScore W2029421625C56052488 @default.
• W2029421625 hasConceptScore W2029421625C7070889 @default.
• W2029421625 hasConceptScore W2029421625C8010536 @default.
• W2029421625 hasIssue "1-3" @default.
• W2029421625 hasLocation W20294216251 @default.

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