Matches in SemOpenAlex for { <https://semopenalex.org/work/W2029438426> ?p ?o ?g. }
Showing items 1 to 61 of
61
with 100 items per page.
- W2029438426 abstract "Diamond disks are indispensable for dressing CMP pads. However, due to the leveling requirement, only a few percents of diamond grits can penetrate the pad. As these few crystals are worn out, the plastic deformation of the pad becomes large relative to the amount of pad is cut. Consequently, the pad becomes highly deformed and loaded with dirt. The polishing rate will then decline; and the scratch rate, increase. A novel technique has been developed to identify the cutting tips and their dulling process. The cutting paths become widen and shallow with more and more deformed pad material. Eventually, fewer and fewer scratch lines are present with most touching diamond pushing deformed pad around. Because there are only a handful of diamond grits that are engaged in cutting pad, the number of working crystals can increased substantially by improving the leveling of diamond tips. This improvement can increase the longevity of diamond disks that paves the way for future CMP of 18 inches wafers scheduled to make the debut in 2012." @default.
- W2029438426 created "2016-06-24" @default.
- W2029438426 creator A5036736047 @default.
- W2029438426 creator A5037031984 @default.
- W2029438426 creator A5058800651 @default.
- W2029438426 creator A5071021512 @default.
- W2029438426 creator A5071543761 @default.
- W2029438426 creator A5087099107 @default.
- W2029438426 creator A5087182415 @default.
- W2029438426 date "2019-12-17" @default.
- W2029438426 modified "2023-10-17" @default.
- W2029438426 title "The Pad Dressing Phenomena of Multiple Diamond Grits: Implications for the Design of CMP Pad Conditioners" @default.
- W2029438426 cites W872311160 @default.
- W2029438426 doi "https://doi.org/10.1149/1.3360687" @default.
- W2029438426 hasPublicationYear "2019" @default.
- W2029438426 type Work @default.
- W2029438426 sameAs 2029438426 @default.
- W2029438426 citedByCount "1" @default.
- W2029438426 crossrefType "journal-article" @default.
- W2029438426 hasAuthorship W2029438426A5036736047 @default.
- W2029438426 hasAuthorship W2029438426A5037031984 @default.
- W2029438426 hasAuthorship W2029438426A5058800651 @default.
- W2029438426 hasAuthorship W2029438426A5071021512 @default.
- W2029438426 hasAuthorship W2029438426A5071543761 @default.
- W2029438426 hasAuthorship W2029438426A5087099107 @default.
- W2029438426 hasAuthorship W2029438426A5087182415 @default.
- W2029438426 hasConcept C138113353 @default.
- W2029438426 hasConcept C159985019 @default.
- W2029438426 hasConcept C160671074 @default.
- W2029438426 hasConcept C171250308 @default.
- W2029438426 hasConcept C192562407 @default.
- W2029438426 hasConcept C2776074547 @default.
- W2029438426 hasConcept C2776921476 @default.
- W2029438426 hasConcept C2780198632 @default.
- W2029438426 hasConcept C2781235140 @default.
- W2029438426 hasConceptScore W2029438426C138113353 @default.
- W2029438426 hasConceptScore W2029438426C159985019 @default.
- W2029438426 hasConceptScore W2029438426C160671074 @default.
- W2029438426 hasConceptScore W2029438426C171250308 @default.
- W2029438426 hasConceptScore W2029438426C192562407 @default.
- W2029438426 hasConceptScore W2029438426C2776074547 @default.
- W2029438426 hasConceptScore W2029438426C2776921476 @default.
- W2029438426 hasConceptScore W2029438426C2780198632 @default.
- W2029438426 hasConceptScore W2029438426C2781235140 @default.
- W2029438426 hasLocation W20294384261 @default.
- W2029438426 hasOpenAccess W2029438426 @default.
- W2029438426 hasPrimaryLocation W20294384261 @default.
- W2029438426 hasRelatedWork W10570272 @default.
- W2029438426 hasRelatedWork W12465341 @default.
- W2029438426 hasRelatedWork W18371557 @default.
- W2029438426 hasRelatedWork W19142871 @default.
- W2029438426 hasRelatedWork W36134243 @default.
- W2029438426 hasRelatedWork W39775638 @default.
- W2029438426 hasRelatedWork W42824180 @default.
- W2029438426 hasRelatedWork W50795360 @default.
- W2029438426 hasRelatedWork W51135985 @default.
- W2029438426 hasRelatedWork W54839772 @default.
- W2029438426 isParatext "false" @default.
- W2029438426 isRetracted "false" @default.
- W2029438426 magId "2029438426" @default.
- W2029438426 workType "article" @default.