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- W2029450511 abstract "A new rapid thermal diffusion (proximity RTD) method, utilizing spin-on dopant (SOD) layers, was reported recently. This technique is based on an evaporation-gas phase diffusion- adsorption-surface reaction-diffusion in Si scheme. In this paper we use FTIR spectroscopy to investigate a relationship between the SOD layer structure/composition and its doping efficiency, as determined by sheet resistance (R<SUB>S</SUB>) measurements, for a phosphorus diffusion case." @default.
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- W2029450511 date "1994-01-31" @default.
- W2029450511 modified "2023-09-26" @default.
- W2029450511 title "Fourier transform infrared spectroscopic analysis of spin-on dopant layers used in proximity rapid thermal diffusion" @default.
- W2029450511 doi "https://doi.org/10.1117/12.166690" @default.
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