Matches in SemOpenAlex for { <https://semopenalex.org/work/W2029457520> ?p ?o ?g. }
Showing items 1 to 64 of
64
with 100 items per page.
- W2029457520 abstract "Micromechanics and, in particular, micromechanics for actuators requires a processing tool that can provide 3-dimensionality and can accommodate many materials in a cost effective manner. The tool is further enhanced if high geometric resolution and compatibility with microelectronics are provided for. The desired attributes for the processing tool are in part contained in the original German LIGA process which introduced deep x-ray lithography and metal plating to micromechanics with achieved structural heights above 500 micrometer. This process can and has been extended to heights above 1 cm with improved resolution by developing a low stress photoresist application technology which is based on precut photoresist sheets and solvent bonding. Exposure of these thick layers is achieved by using 20 keV photon fluxes from the Brookhaven National Laboratory 2.6 GeV synchrotron. Application of this technology to actuator construction has taken two forms: linear, spring constrained electrostatic and magnetic actuators with large throws, and magnetic rotational machines for either high output torques or very high rotational speeds.© (1994) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only." @default.
- W2029457520 created "2016-06-24" @default.
- W2029457520 creator A5001845331 @default.
- W2029457520 creator A5033798944 @default.
- W2029457520 creator A5037112507 @default.
- W2029457520 creator A5052897296 @default.
- W2029457520 date "1994-05-13" @default.
- W2029457520 modified "2023-10-18" @default.
- W2029457520 title "Micromechanics for actuators via deep x-ray lithography" @default.
- W2029457520 doi "https://doi.org/10.1117/12.175836" @default.
- W2029457520 hasPublicationYear "1994" @default.
- W2029457520 type Work @default.
- W2029457520 sameAs 2029457520 @default.
- W2029457520 citedByCount "13" @default.
- W2029457520 countsByYear W20294575202016 @default.
- W2029457520 countsByYear W20294575202018 @default.
- W2029457520 crossrefType "proceedings-article" @default.
- W2029457520 hasAuthorship W2029457520A5001845331 @default.
- W2029457520 hasAuthorship W2029457520A5033798944 @default.
- W2029457520 hasAuthorship W2029457520A5037112507 @default.
- W2029457520 hasAuthorship W2029457520A5052897296 @default.
- W2029457520 hasConcept C104779481 @default.
- W2029457520 hasConcept C154945302 @default.
- W2029457520 hasConcept C159985019 @default.
- W2029457520 hasConcept C171250308 @default.
- W2029457520 hasConcept C172707124 @default.
- W2029457520 hasConcept C192562407 @default.
- W2029457520 hasConcept C204223013 @default.
- W2029457520 hasConcept C2779227376 @default.
- W2029457520 hasConcept C37167619 @default.
- W2029457520 hasConcept C41008148 @default.
- W2029457520 hasConcept C41794268 @default.
- W2029457520 hasConcept C49040817 @default.
- W2029457520 hasConcept C53524968 @default.
- W2029457520 hasConceptScore W2029457520C104779481 @default.
- W2029457520 hasConceptScore W2029457520C154945302 @default.
- W2029457520 hasConceptScore W2029457520C159985019 @default.
- W2029457520 hasConceptScore W2029457520C171250308 @default.
- W2029457520 hasConceptScore W2029457520C172707124 @default.
- W2029457520 hasConceptScore W2029457520C192562407 @default.
- W2029457520 hasConceptScore W2029457520C204223013 @default.
- W2029457520 hasConceptScore W2029457520C2779227376 @default.
- W2029457520 hasConceptScore W2029457520C37167619 @default.
- W2029457520 hasConceptScore W2029457520C41008148 @default.
- W2029457520 hasConceptScore W2029457520C41794268 @default.
- W2029457520 hasConceptScore W2029457520C49040817 @default.
- W2029457520 hasConceptScore W2029457520C53524968 @default.
- W2029457520 hasLocation W20294575201 @default.
- W2029457520 hasOpenAccess W2029457520 @default.
- W2029457520 hasPrimaryLocation W20294575201 @default.
- W2029457520 hasRelatedWork W1999660809 @default.
- W2029457520 hasRelatedWork W2015078055 @default.
- W2029457520 hasRelatedWork W2039969115 @default.
- W2029457520 hasRelatedWork W2055565127 @default.
- W2029457520 hasRelatedWork W2057031341 @default.
- W2029457520 hasRelatedWork W2157979716 @default.
- W2029457520 hasRelatedWork W2234767249 @default.
- W2029457520 hasRelatedWork W2286611994 @default.
- W2029457520 hasRelatedWork W2327881584 @default.
- W2029457520 hasRelatedWork W2883461808 @default.
- W2029457520 isParatext "false" @default.
- W2029457520 isRetracted "false" @default.
- W2029457520 magId "2029457520" @default.
- W2029457520 workType "article" @default.