FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2029492843> ?p ?o ?g. }

• W2029492843 endingPage "7151" @default.
• W2029492843 startingPage "7151" @default.
• W2029492843 abstract "We investigated the effects of under layer pretreatments on Cu electroless deposition to optimize the resistivity and morphology of the Cu. The pretreatments used in the Cu electroless plating process consisted of the removal of the titanium oxide layer on the barrier metal, TiN, and the deposition of Pd to activate the TiN diffusion barrier layer. Surface pretreatment using a 1%HF solution to remove the native Ti oxide formed on a TiN diffusion barrier layer showed a remarkable surface conditioning effect for the catalytic metal activation stage in Cu electroless plating, even in the absence of a wetting agent. Microcavities generated during Ti oxide etching are believed to be the key factor for the improved uniformity of the deposited catalytic metal on the pretreated TiN layer. Electroless plated Cu layers on non-uniform or rough Pd layers exhibited high resistivity and RMS roughness." @default.
• W2029492843 created "2016-06-24" @default.
• W2029492843 creator A5006634799 @default.
• W2029492843 creator A5055650810 @default.
• W2029492843 date "2001-12-01" @default.
• W2029492843 modified "2023-09-25" @default.
• W2029492843 title "Optimized Surface Pre-treatments for Cu Electroless Plating in ULSI Device Interconnection" @default.
• W2029492843 cites W1970444588 @default.
• W2029492843 cites W1978970671 @default.
• W2029492843 cites W1985412493 @default.
• W2029492843 cites W1985756448 @default.
• W2029492843 cites W2017729484 @default.
• W2029492843 cites W2020812919 @default.
• W2029492843 cites W2027228089 @default.
• W2029492843 cites W2028866283 @default.
• W2029492843 cites W2075512315 @default.
• W2029492843 cites W2091633122 @default.
• W2029492843 cites W2091989934 @default.
• W2029492843 cites W2143325090 @default.
• W2029492843 doi "https://doi.org/10.1143/jjap.40.7151" @default.
• W2029492843 hasPublicationYear "2001" @default.
• W2029492843 type Work @default.
• W2029492843 sameAs 2029492843 @default.
• W2029492843 citedByCount "31" @default.
• W2029492843 countsByYear W20294928432012 @default.
• W2029492843 countsByYear W20294928432013 @default.
• W2029492843 countsByYear W20294928432019 @default.
• W2029492843 countsByYear W20294928432022 @default.
• W2029492843 crossrefType "journal-article" @default.
• W2029492843 hasAuthorship W2029492843A5006634799 @default.
• W2029492843 hasAuthorship W2029492843A5055650810 @default.
• W2029492843 hasConcept C100460472 @default.
• W2029492843 hasConcept C107365816 @default.
• W2029492843 hasConcept C127313418 @default.
• W2029492843 hasConcept C127413603 @default.
• W2029492843 hasConcept C134514944 @default.
• W2029492843 hasConcept C151730666 @default.
• W2029492843 hasConcept C159985019 @default.
• W2029492843 hasConcept C171250308 @default.
• W2029492843 hasConcept C191897082 @default.
• W2029492843 hasConcept C192562407 @default.
• W2029492843 hasConcept C2776985018 @default.
• W2029492843 hasConcept C2778836790 @default.
• W2029492843 hasConcept C2779227376 @default.
• W2029492843 hasConcept C2779833192 @default.
• W2029492843 hasConcept C2779851234 @default.
• W2029492843 hasConcept C2780924660 @default.
• W2029492843 hasConcept C2816523 @default.
• W2029492843 hasConcept C29216876 @default.
• W2029492843 hasConcept C42360764 @default.
• W2029492843 hasConcept C51807945 @default.
• W2029492843 hasConcept C525849907 @default.
• W2029492843 hasConcept C544153396 @default.
• W2029492843 hasConcept C64297162 @default.
• W2029492843 hasConcept C8058405 @default.
• W2029492843 hasConcept C86803240 @default.
• W2029492843 hasConceptScore W2029492843C100460472 @default.
• W2029492843 hasConceptScore W2029492843C107365816 @default.
• W2029492843 hasConceptScore W2029492843C127313418 @default.
• W2029492843 hasConceptScore W2029492843C127413603 @default.
• W2029492843 hasConceptScore W2029492843C134514944 @default.
• W2029492843 hasConceptScore W2029492843C151730666 @default.
• W2029492843 hasConceptScore W2029492843C159985019 @default.
• W2029492843 hasConceptScore W2029492843C171250308 @default.
• W2029492843 hasConceptScore W2029492843C191897082 @default.
• W2029492843 hasConceptScore W2029492843C192562407 @default.
• W2029492843 hasConceptScore W2029492843C2776985018 @default.
• W2029492843 hasConceptScore W2029492843C2778836790 @default.
• W2029492843 hasConceptScore W2029492843C2779227376 @default.
• W2029492843 hasConceptScore W2029492843C2779833192 @default.
• W2029492843 hasConceptScore W2029492843C2779851234 @default.
• W2029492843 hasConceptScore W2029492843C2780924660 @default.
• W2029492843 hasConceptScore W2029492843C2816523 @default.
• W2029492843 hasConceptScore W2029492843C29216876 @default.
• W2029492843 hasConceptScore W2029492843C42360764 @default.
• W2029492843 hasConceptScore W2029492843C51807945 @default.
• W2029492843 hasConceptScore W2029492843C525849907 @default.
• W2029492843 hasConceptScore W2029492843C544153396 @default.
• W2029492843 hasConceptScore W2029492843C64297162 @default.
• W2029492843 hasConceptScore W2029492843C8058405 @default.
• W2029492843 hasConceptScore W2029492843C86803240 @default.
• W2029492843 hasIssue "12R" @default.
• W2029492843 hasLocation W20294928431 @default.
• W2029492843 hasOpenAccess W2029492843 @default.
• W2029492843 hasPrimaryLocation W20294928431 @default.
• W2029492843 hasRelatedWork W1966071407 @default.
• W2029492843 hasRelatedWork W1993361248 @default.
• W2029492843 hasRelatedWork W2004800457 @default.
• W2029492843 hasRelatedWork W2029492843 @default.
• W2029492843 hasRelatedWork W2150742827 @default.
• W2029492843 hasRelatedWork W2360603427 @default.
• W2029492843 hasRelatedWork W2379489181 @default.
• W2029492843 hasRelatedWork W2995602552 @default.
• W2029492843 hasRelatedWork W3143555417 @default.
• W2029492843 hasRelatedWork W4210507835 @default.
• W2029492843 hasVolume "40" @default.
• W2029492843 isParatext "false" @default.
• W2029492843 isRetracted "false" @default.

• next