Matches in SemOpenAlex for { <https://semopenalex.org/work/W2029557514> ?p ?o ?g. }
- W2029557514 endingPage "281" @default.
- W2029557514 startingPage "249" @default.
- W2029557514 abstract "Mass spectra have been obtained for positive and negative ions extracted from a multipole discharge where thin films of hydrogenated amorphous silicon are produced from silane and disilane plasma decomposition. Highly polymerized ions of both signs are observed at high pressure. In silane plasmas, the pressure dependence of the positive ion composition is described according to known reaction schemes. The first steps of negative ion formation and reaction are discussed. Hydrogen depletion of large oligomeric negative ions is attributed to increasing electron affinities from SinH4–5 to SinH0–1. An upper limit for the total reaction rate coefficient, k, for Sin− and SinH− (n = 2 to 6) on SiH4 is found to be ≤5×10−13 cm3 molecule−1 s−1 which is consistent with the similar upper limit for the total reaction rate coefficients for C2− and C2H− on CH4. The influence of increasing discharge currents on the positive and negative ion chemistry is also analyzed." @default.
- W2029557514 created "2016-06-24" @default.
- W2029557514 creator A5017127239 @default.
- W2029557514 creator A5034883447 @default.
- W2029557514 creator A5070386333 @default.
- W2029557514 creator A5089891754 @default.
- W2029557514 date "1984-05-01" @default.
- W2029557514 modified "2023-09-23" @default.
- W2029557514 title "Positive and negative ions in silane and disilane multipole discharges" @default.
- W2029557514 cites W1970355722 @default.
- W2029557514 cites W1982642087 @default.
- W2029557514 cites W1987210368 @default.
- W2029557514 cites W1988438523 @default.
- W2029557514 cites W1988874459 @default.
- W2029557514 cites W1992469364 @default.
- W2029557514 cites W2003278878 @default.
- W2029557514 cites W2004784136 @default.
- W2029557514 cites W2009611452 @default.
- W2029557514 cites W2013356858 @default.
- W2029557514 cites W2019737727 @default.
- W2029557514 cites W2024745036 @default.
- W2029557514 cites W2027331653 @default.
- W2029557514 cites W2027897350 @default.
- W2029557514 cites W2028724597 @default.
- W2029557514 cites W2032727104 @default.
- W2029557514 cites W2034475354 @default.
- W2029557514 cites W2040053271 @default.
- W2029557514 cites W2042905200 @default.
- W2029557514 cites W2046642264 @default.
- W2029557514 cites W2052040284 @default.
- W2029557514 cites W2052068308 @default.
- W2029557514 cites W2052530981 @default.
- W2029557514 cites W2053994856 @default.
- W2029557514 cites W2061773230 @default.
- W2029557514 cites W2063128597 @default.
- W2029557514 cites W2065660075 @default.
- W2029557514 cites W2072548404 @default.
- W2029557514 cites W2074550430 @default.
- W2029557514 cites W2075221860 @default.
- W2029557514 cites W2078065629 @default.
- W2029557514 cites W2081357577 @default.
- W2029557514 cites W2085624328 @default.
- W2029557514 cites W2085700520 @default.
- W2029557514 cites W2088682389 @default.
- W2029557514 cites W2090397999 @default.
- W2029557514 cites W2093212842 @default.
- W2029557514 cites W2101877249 @default.
- W2029557514 cites W2122483116 @default.
- W2029557514 cites W2148638943 @default.
- W2029557514 cites W2215679301 @default.
- W2029557514 cites W2328765690 @default.
- W2029557514 cites W2899466192 @default.
- W2029557514 cites W3004805229 @default.
- W2029557514 doi "https://doi.org/10.1016/0168-1176(84)85082-x" @default.
- W2029557514 hasPublicationYear "1984" @default.
- W2029557514 type Work @default.
- W2029557514 sameAs 2029557514 @default.
- W2029557514 citedByCount "62" @default.
- W2029557514 countsByYear W20295575142012 @default.
- W2029557514 countsByYear W20295575142013 @default.
- W2029557514 countsByYear W20295575142017 @default.
- W2029557514 countsByYear W20295575142019 @default.
- W2029557514 countsByYear W20295575142020 @default.
- W2029557514 crossrefType "journal-article" @default.
- W2029557514 hasAuthorship W2029557514A5017127239 @default.
- W2029557514 hasAuthorship W2029557514A5034883447 @default.
- W2029557514 hasAuthorship W2029557514A5070386333 @default.
- W2029557514 hasAuthorship W2029557514A5089891754 @default.
- W2029557514 hasConcept C113196181 @default.
- W2029557514 hasConcept C124681953 @default.
- W2029557514 hasConcept C145148216 @default.
- W2029557514 hasConcept C178790620 @default.
- W2029557514 hasConcept C179104552 @default.
- W2029557514 hasConcept C185592680 @default.
- W2029557514 hasConcept C2776259327 @default.
- W2029557514 hasConcept C2778024649 @default.
- W2029557514 hasConcept C40325409 @default.
- W2029557514 hasConceptScore W2029557514C113196181 @default.
- W2029557514 hasConceptScore W2029557514C124681953 @default.
- W2029557514 hasConceptScore W2029557514C145148216 @default.
- W2029557514 hasConceptScore W2029557514C178790620 @default.
- W2029557514 hasConceptScore W2029557514C179104552 @default.
- W2029557514 hasConceptScore W2029557514C185592680 @default.
- W2029557514 hasConceptScore W2029557514C2776259327 @default.
- W2029557514 hasConceptScore W2029557514C2778024649 @default.
- W2029557514 hasConceptScore W2029557514C40325409 @default.
- W2029557514 hasIssue "3" @default.
- W2029557514 hasLocation W20295575141 @default.
- W2029557514 hasOpenAccess W2029557514 @default.
- W2029557514 hasPrimaryLocation W20295575141 @default.
- W2029557514 hasRelatedWork W1973075598 @default.
- W2029557514 hasRelatedWork W2020607340 @default.
- W2029557514 hasRelatedWork W2026005392 @default.
- W2029557514 hasRelatedWork W2026642978 @default.
- W2029557514 hasRelatedWork W2035941124 @default.
- W2029557514 hasRelatedWork W2090316086 @default.
- W2029557514 hasRelatedWork W2163766209 @default.
- W2029557514 hasRelatedWork W2316361328 @default.