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Matches in SemOpenAlex for { <https://semopenalex.org/work/W2029562724> ?p ?o ?g. }

• W2029562724 endingPage "674" @default.
• W2029562724 startingPage "665" @default.
• W2029562724 abstract "The study of the oxidation mechanism of low pressure and plasma-enhanced chemically vapour-deposited silicon nitride and oxynitride thin films in H2OO2 mixtures and the nitridation of SiO2 thin films in NH3 is motivated by the growing interest in these processes for use in microelectronics technology. In this paper, recent experimental results of oxidation and nitridation studies will be reviewed. Most reported data have been obtained using high energy ion beam analysis techniques. The results of (among others) hydrogen depth-profiling measurements unravel the essential role of hydrogen in the conversion of (oxy)nitride into oxide and of oxide into oxynitride. A unified picture describing the mechanisms of the oxidation and nitridation will be discussed." @default.
• W2029562724 created "2016-06-24" @default.
• W2029562724 creator A5033989295 @default.
• W2029562724 creator A5038996522 @default.
• W2029562724 date "1990-12-01" @default.
• W2029562724 modified "2023-09-28" @default.
• W2029562724 title "Oxidation of silicon (oxy)nitride and nitridation of silicon dioxide: Manifestations of the same chemical reaction system?" @default.
• W2029562724 cites W1966275215 @default.
• W2029562724 cites W1977018914 @default.
• W2029562724 cites W1978060988 @default.
• W2029562724 cites W1983930137 @default.
• W2029562724 cites W1991947465 @default.
• W2029562724 cites W1992466084 @default.
• W2029562724 cites W2000589034 @default.
• W2029562724 cites W2000701730 @default.
• W2029562724 cites W2001314597 @default.
• W2029562724 cites W2021893819 @default.
• W2029562724 cites W2023838918 @default.
• W2029562724 cites W2033488678 @default.
• W2029562724 cites W2038096151 @default.
• W2029562724 cites W2044547730 @default.
• W2029562724 cites W2047673520 @default.
• W2029562724 cites W2051984647 @default.
• W2029562724 cites W2061901644 @default.
• W2029562724 cites W2069705357 @default.
• W2029562724 cites W2078220437 @default.
• W2029562724 cites W2082413963 @default.
• W2029562724 cites W2087794105 @default.
• W2029562724 cites W2091590619 @default.
• W2029562724 cites W2093895087 @default.
• W2029562724 cites W4246063807 @default.
• W2029562724 cites W2080215142 @default.
• W2029562724 doi "https://doi.org/10.1016/0040-6090(90)90217-2" @default.
• W2029562724 hasPublicationYear "1990" @default.
• W2029562724 type Work @default.
• W2029562724 sameAs 2029562724 @default.
• W2029562724 citedByCount "19" @default.
• W2029562724 countsByYear W20295627242019 @default.
• W2029562724 countsByYear W20295627242022 @default.
• W2029562724 countsByYear W20295627242023 @default.
• W2029562724 crossrefType "journal-article" @default.
• W2029562724 hasAuthorship W2029562724A5033989295 @default.
• W2029562724 hasAuthorship W2029562724A5038996522 @default.
• W2029562724 hasConcept C127413603 @default.
• W2029562724 hasConcept C171250308 @default.
• W2029562724 hasConcept C178790620 @default.
• W2029562724 hasConcept C179104552 @default.
• W2029562724 hasConcept C185592680 @default.
• W2029562724 hasConcept C187937830 @default.
• W2029562724 hasConcept C19067145 @default.
• W2029562724 hasConcept C191897082 @default.
• W2029562724 hasConcept C192562407 @default.
• W2029562724 hasConcept C194760766 @default.
• W2029562724 hasConcept C195114451 @default.
• W2029562724 hasConcept C2777431650 @default.
• W2029562724 hasConcept C2779089622 @default.
• W2029562724 hasConcept C2779227376 @default.
• W2029562724 hasConcept C2779476251 @default.
• W2029562724 hasConcept C2779851234 @default.
• W2029562724 hasConcept C42360764 @default.
• W2029562724 hasConcept C49040817 @default.
• W2029562724 hasConcept C512968161 @default.
• W2029562724 hasConcept C544956773 @default.
• W2029562724 hasConceptScore W2029562724C127413603 @default.
• W2029562724 hasConceptScore W2029562724C171250308 @default.
• W2029562724 hasConceptScore W2029562724C178790620 @default.
• W2029562724 hasConceptScore W2029562724C179104552 @default.
• W2029562724 hasConceptScore W2029562724C185592680 @default.
• W2029562724 hasConceptScore W2029562724C187937830 @default.
• W2029562724 hasConceptScore W2029562724C19067145 @default.
• W2029562724 hasConceptScore W2029562724C191897082 @default.
• W2029562724 hasConceptScore W2029562724C192562407 @default.
• W2029562724 hasConceptScore W2029562724C194760766 @default.
• W2029562724 hasConceptScore W2029562724C195114451 @default.
• W2029562724 hasConceptScore W2029562724C2777431650 @default.
• W2029562724 hasConceptScore W2029562724C2779089622 @default.
• W2029562724 hasConceptScore W2029562724C2779227376 @default.
• W2029562724 hasConceptScore W2029562724C2779476251 @default.
• W2029562724 hasConceptScore W2029562724C2779851234 @default.
• W2029562724 hasConceptScore W2029562724C42360764 @default.
• W2029562724 hasConceptScore W2029562724C49040817 @default.
• W2029562724 hasConceptScore W2029562724C512968161 @default.
• W2029562724 hasConceptScore W2029562724C544956773 @default.
• W2029562724 hasLocation W20295627241 @default.
• W2029562724 hasOpenAccess W2029562724 @default.
• W2029562724 hasPrimaryLocation W20295627241 @default.
• W2029562724 hasRelatedWork W146845350 @default.
• W2029562724 hasRelatedWork W2110115418 @default.
• W2029562724 hasRelatedWork W2134861945 @default.
• W2029562724 hasRelatedWork W2149618594 @default.
• W2029562724 hasRelatedWork W2330103845 @default.
• W2029562724 hasRelatedWork W2392807836 @default.
• W2029562724 hasRelatedWork W2542813514 @default.
• W2029562724 hasRelatedWork W2952701050 @default.
• W2029562724 hasRelatedWork W182073671 @default.
• W2029562724 hasRelatedWork W2094021022 @default.
• W2029562724 hasVolume "193-194" @default.
• W2029562724 isParatext "false" @default.

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