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- W2029599676 abstract "The projected range and range straggling of 1.0 MeV 115In, 132 Xe, 181Ta and 208Pb and 2.0 MeV 208Pb ions in amorphized silicon have been measured by Rutherford backscattering spectrometry. The experimentally determined projected range Rp and the values predicted by TRIM deviate by less than 10% for the implantations of 115In, 181Ta and 208Pb at 1.0 MeV; for 1.0 MeV 132Xe ions and 2.0 MeV 208Pb ions differences of 23% and 17% with Rp-values from TRIM are observed. A considerable discrepancy is found for the range straggling of all implanted species with deviations up to 44%." @default.
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- W2029599676 date "1990-03-01" @default.
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- W2029599676 title "Range straggling of MeV ions in amorphous silicon: Discrepancies with TRIM" @default.
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- W2029599676 doi "https://doi.org/10.1016/0168-583x(90)90158-q" @default.
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