FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2029602489> ?p ?o ?g. }

• W2029602489 abstract "We measure and successfully model the deposition rate (R) of epitaxial Si by hot-wire chemical vapor deposition (HWCVD) onto (100) silicon over a wide range of growth conditions. A deposition rate model based on the fundamentals of gas-filament and gas-substrate interactions is presented; the results are consistent with the observed dependences of R on gas pressure, flow, and filament area. Gas-phase measurements of silane depletion allow calculation of the average radical sticking coefficient from the film deposition rate. Our findings indicate that the epitaxial deposition rate can be increased sufficiently to enable an economical epitaxial film-silicon photovoltaic tech-nology on low-cost foreign substrates. The model can be simply adapted to apply to the HWCVD of amorphous, nanocrystalline, and polycrystalline Si." @default.
• W2029602489 created "2016-06-24" @default.
• W2029602489 creator A5031110030 @default.
• W2029602489 creator A5045296789 @default.
• W2029602489 creator A5048334317 @default.
• W2029602489 creator A5068349523 @default.
• W2029602489 creator A5018391876 @default.
• W2029602489 date "2010-03-01" @default.
• W2029602489 modified "2023-09-23" @default.
• W2029602489 title "Physics and chemistry of hot-wire chemical vapor deposition from silane: Measuring and modeling the silicon epitaxy deposition rate" @default.
• W2029602489 cites W1968914443 @default.
• W2029602489 cites W1972256607 @default.
• W2029602489 cites W1972467686 @default.
• W2029602489 cites W1977424041 @default.
• W2029602489 cites W1977818154 @default.
• W2029602489 cites W1983504956 @default.
• W2029602489 cites W1991084552 @default.
• W2029602489 cites W1994411729 @default.
• W2029602489 cites W1998360144 @default.
• W2029602489 cites W2003958088 @default.
• W2029602489 cites W2005379894 @default.
• W2029602489 cites W2012077771 @default.
• W2029602489 cites W2014152561 @default.
• W2029602489 cites W2015654638 @default.
• W2029602489 cites W2039402787 @default.
• W2029602489 cites W2039934140 @default.
• W2029602489 cites W2042129783 @default.
• W2029602489 cites W2049320133 @default.
• W2029602489 cites W2049478289 @default.
• W2029602489 cites W2049882705 @default.
• W2029602489 cites W2050806988 @default.
• W2029602489 cites W2057259454 @default.
• W2029602489 cites W2058129143 @default.
• W2029602489 cites W2058323245 @default.
• W2029602489 cites W2059599124 @default.
• W2029602489 cites W2062404563 @default.
• W2029602489 cites W2067110809 @default.
• W2029602489 cites W2073347668 @default.
• W2029602489 cites W2074817508 @default.
• W2029602489 cites W2085072569 @default.
• W2029602489 cites W2086940583 @default.
• W2029602489 cites W2089688294 @default.
• W2029602489 cites W2093322059 @default.
• W2029602489 cites W2103629036 @default.
• W2029602489 cites W2120847367 @default.
• W2029602489 cites W2142980370 @default.
• W2029602489 cites W2625699652 @default.
• W2029602489 doi "https://doi.org/10.1063/1.3298455" @default.
• W2029602489 hasPublicationYear "2010" @default.
• W2029602489 type Work @default.
• W2029602489 sameAs 2029602489 @default.
• W2029602489 citedByCount "12" @default.
• W2029602489 countsByYear W20296024892013 @default.
• W2029602489 countsByYear W20296024892017 @default.
• W2029602489 countsByYear W20296024892018 @default.
• W2029602489 countsByYear W20296024892019 @default.
• W2029602489 crossrefType "journal-article" @default.
• W2029602489 hasAuthorship W2029602489A5018391876 @default.
• W2029602489 hasAuthorship W2029602489A5031110030 @default.
• W2029602489 hasAuthorship W2029602489A5045296789 @default.
• W2029602489 hasAuthorship W2029602489A5048334317 @default.
• W2029602489 hasAuthorship W2029602489A5068349523 @default.
• W2029602489 hasConcept C110738630 @default.
• W2029602489 hasConcept C111368507 @default.
• W2029602489 hasConcept C111548154 @default.
• W2029602489 hasConcept C113196181 @default.
• W2029602489 hasConcept C118442862 @default.
• W2029602489 hasConcept C127313418 @default.
• W2029602489 hasConcept C140676511 @default.
• W2029602489 hasConcept C151730666 @default.
• W2029602489 hasConcept C159985019 @default.
• W2029602489 hasConcept C171250308 @default.
• W2029602489 hasConcept C178790620 @default.
• W2029602489 hasConcept C183866003 @default.
• W2029602489 hasConcept C185592680 @default.
• W2029602489 hasConcept C19067145 @default.
• W2029602489 hasConcept C192562407 @default.
• W2029602489 hasConcept C2776390347 @default.
• W2029602489 hasConcept C2777289219 @default.
• W2029602489 hasConcept C2778024649 @default.
• W2029602489 hasConcept C2778183973 @default.
• W2029602489 hasConcept C2779227376 @default.
• W2029602489 hasConcept C2779667780 @default.
• W2029602489 hasConcept C2780565262 @default.
• W2029602489 hasConcept C2816523 @default.
• W2029602489 hasConcept C49040817 @default.
• W2029602489 hasConcept C544956773 @default.
• W2029602489 hasConcept C57410435 @default.
• W2029602489 hasConcept C64297162 @default.
• W2029602489 hasConcept C75937256 @default.
• W2029602489 hasConcept C80086925 @default.
• W2029602489 hasConcept C87359718 @default.
• W2029602489 hasConceptScore W2029602489C110738630 @default.
• W2029602489 hasConceptScore W2029602489C111368507 @default.
• W2029602489 hasConceptScore W2029602489C111548154 @default.
• W2029602489 hasConceptScore W2029602489C113196181 @default.
• W2029602489 hasConceptScore W2029602489C118442862 @default.
• W2029602489 hasConceptScore W2029602489C127313418 @default.
• W2029602489 hasConceptScore W2029602489C140676511 @default.
• W2029602489 hasConceptScore W2029602489C151730666 @default.

• next