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- W2029671071 endingPage "223" @default.
- W2029671071 startingPage "223" @default.
- W2029671071 abstract "Silicon dioxide was thermally grown in an oxygen atmosphere containing a small percentage of trichloroethylene vapor. As a result of this process, it was possible to fabricate metal‐oxide‐semiconductor (MOS) diodes with greatly reduced oxide space charge. This reduction in oxide charge was accompanied by improved electrical stability under bias‐temperature stress. It is believed that the pyrolysis product, chlorine, acts as a getter to continuously remove mobile impurity cations such as Na+ during the oxidation process. Also described are various charge phenomena under bias‐temperature stress conditions." @default.
- W2029671071 created "2016-06-24" @default.
- W2029671071 creator A5035606497 @default.
- W2029671071 creator A5085726128 @default.
- W2029671071 date "1972-01-01" @default.
- W2029671071 modified "2023-10-17" @default.
- W2029671071 title "Oxide Charge Reduction by Chemical Gettering with Trichloroethylene During Thermal Oxidation of Silicon" @default.
- W2029671071 doi "https://doi.org/10.1149/1.2404165" @default.
- W2029671071 hasPublicationYear "1972" @default.
- W2029671071 type Work @default.
- W2029671071 sameAs 2029671071 @default.
- W2029671071 citedByCount "22" @default.
- W2029671071 crossrefType "journal-article" @default.
- W2029671071 hasAuthorship W2029671071A5035606497 @default.
- W2029671071 hasAuthorship W2029671071A5085726128 @default.
- W2029671071 hasConcept C103132145 @default.
- W2029671071 hasConcept C121332964 @default.
- W2029671071 hasConcept C125099081 @default.
- W2029671071 hasConcept C147120987 @default.
- W2029671071 hasConcept C179104552 @default.
- W2029671071 hasConcept C185592680 @default.
- W2029671071 hasConcept C191897082 @default.
- W2029671071 hasConcept C192562407 @default.
- W2029671071 hasConcept C2779281663 @default.
- W2029671071 hasConcept C2779851234 @default.
- W2029671071 hasConcept C49040817 @default.
- W2029671071 hasConcept C544956773 @default.
- W2029671071 hasConcept C62520636 @default.
- W2029671071 hasConceptScore W2029671071C103132145 @default.
- W2029671071 hasConceptScore W2029671071C121332964 @default.
- W2029671071 hasConceptScore W2029671071C125099081 @default.
- W2029671071 hasConceptScore W2029671071C147120987 @default.
- W2029671071 hasConceptScore W2029671071C179104552 @default.
- W2029671071 hasConceptScore W2029671071C185592680 @default.
- W2029671071 hasConceptScore W2029671071C191897082 @default.
- W2029671071 hasConceptScore W2029671071C192562407 @default.
- W2029671071 hasConceptScore W2029671071C2779281663 @default.
- W2029671071 hasConceptScore W2029671071C2779851234 @default.
- W2029671071 hasConceptScore W2029671071C49040817 @default.
- W2029671071 hasConceptScore W2029671071C544956773 @default.
- W2029671071 hasConceptScore W2029671071C62520636 @default.
- W2029671071 hasIssue "2" @default.
- W2029671071 hasLocation W20296710711 @default.
- W2029671071 hasOpenAccess W2029671071 @default.
- W2029671071 hasPrimaryLocation W20296710711 @default.
- W2029671071 hasRelatedWork W1856461572 @default.
- W2029671071 hasRelatedWork W1965594629 @default.
- W2029671071 hasRelatedWork W1981542651 @default.
- W2029671071 hasRelatedWork W2000235795 @default.
- W2029671071 hasRelatedWork W2004574490 @default.
- W2029671071 hasRelatedWork W2018438297 @default.
- W2029671071 hasRelatedWork W2067843835 @default.
- W2029671071 hasRelatedWork W2075349309 @default.
- W2029671071 hasRelatedWork W2787819580 @default.
- W2029671071 hasRelatedWork W2052726931 @default.
- W2029671071 hasVolume "119" @default.
- W2029671071 isParatext "false" @default.
- W2029671071 isRetracted "false" @default.
- W2029671071 magId "2029671071" @default.
- W2029671071 workType "article" @default.