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• W2029671508 abstract "Based on first-principles theoretical calculations, we find a very stable nitrogen complex in oxynitrides, which consists of two N atoms at O sites and one O vacancy. This N complex is electrically inactive without bonding with hydrogen, removing the electrical activity of O vacancies, and the stability of this complex is greatly enhanced as going from pure oxide to oxynitride films. We suggest that charge traps involving a single N atom, such as a bridging N center, can be deactivated by reactions with O or NO interstitials, and resulting N interstitials are easily depleted into the interface, in good agreement with experiments." @default.
• W2029671508 created "2016-06-24" @default.
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• W2029671508 date "2002-12-31" @default.
• W2029671508 modified "2023-09-24" @default.
• W2029671508 title "Electrically inactive nitrogen complex in Si oxynitride" @default.
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• W2029671508 doi "https://doi.org/10.1103/physrevb.66.233205" @default.
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