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- W2029783941 abstract "This paper presents, for the first time, a low-cost, high-throughput manufacturing approach for fabricating n-base dendritic web silicon solar cells with selectively doped emitters and self-aligned aluminum contacts using rapid thermal processing (RTP) and screen printing. The self-aligned locally diffused emitter (SALDE) structure is p+ nn++ where aluminum is screen-printed on a boron-doped emitter and fired in a belt furnace to form a deep self-doped p+-layer and a self-aligned positive contact to the emitter according to the well-known aluminum-silicon (AlSi) alloying process. The SALDE structure preserves the shallow emitter (20.2 μm) everywhere except directly beneath the emitter contact. There the junction depth is greater than 5 μm, as desired, in order to shield carriers in the bulk silicon from that part of the silicon surface covered by metal where the recombination rate is high. This structure is realized by using n-base (rather than p-base) substrates and by utilizing screen-printed aluminum (rather than silver) emitter contacts. Prototype dendritic web silicon (web) cells (25 cm2 area) with efficiencies up to 13.2% have been produced." @default.
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- W2029783941 date "1997-11-01" @default.
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- W2029783941 title "Self-aligned locally diffused emitter (SALDE) silicon solar cell" @default.
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- W2029783941 doi "https://doi.org/10.1016/s0927-0248(97)00092-5" @default.
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