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- W2029796304 abstract "This paper reports the design of a piezoelectrically-driven microfabricated valve for high frequency control of large pressure fluid flows. The enabling concept of the valve is the ability to convert the small displacement of a piezoelectric element into a large valve cap stroke through the use of a hydraulic fluid, while maintaining high force capability. The current valve design, with operating frequency of 24 kHz and valve stroke of 40 micrometer, has been tailored for use in microhydraulic actuation and energy-harvesting devices, which require high-frequency regulation of approximately 1 ml/sec fluid flows across pressure differentials of 1-2 MPa." @default.
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- W2029796304 date "2000-06-22" @default.
- W2029796304 modified "2023-10-16" @default.
- W2029796304 title "Design of a piezoelectrically driven hydraulic amplification microvalve for high-pressure high-frequency applications" @default.
- W2029796304 doi "https://doi.org/10.1117/12.388857" @default.
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