Matches in SemOpenAlex for { <https://semopenalex.org/work/W2029799715> ?p ?o ?g. }
- W2029799715 endingPage "024003" @default.
- W2029799715 startingPage "024003" @default.
- W2029799715 abstract "Fast atom beam (FAB) sources using dc cold cathode discharge, comprising parallel plate electrodes and thick carbon plate cathodes with multiple beam extracting apertures, were developed to generate parallel and straight energetic neutral beams for precise etching of three-dimensional microstructures consisting of insulating materials. Conventional FAB sources and their applications are briefly reviewed, and the advantages of newly developed FAB sources and new applications are introduced. By using SF6 gas, a precise etching of quartz glass with an etch rate of 30 nm min−1, a uniformity of within 4% (P–V) in O76 mm, vertical etch profile, smooth etch surface and long-term etch rate stability over 250 min were realized. The neutralization coefficient and the beam current density were also measured using a secondary electron method and a pulse-counting method, making it possible to measure the neutralization coefficient without referring to databases for secondary electron yields. A neutralization coefficient of 98% was obtained at maximum, although, under practical etching conditions, the neutralization coefficient is less than 70%. By comparing the results of the simple model calculation with the experimental data, it was determined that the neutralization mechanism was dominated by charge transfer. The importance of neutralization in a process chamber is also discussed." @default.
- W2029799715 created "2016-06-24" @default.
- W2029799715 creator A5041684886 @default.
- W2029799715 creator A5067507479 @default.
- W2029799715 date "2008-01-04" @default.
- W2029799715 modified "2023-09-24" @default.
- W2029799715 title "Characterization of neutral beam source using dc cold cathode discharge and its application processes" @default.
- W2029799715 cites W1577071047 @default.
- W2029799715 cites W1972073115 @default.
- W2029799715 cites W1973391216 @default.
- W2029799715 cites W1978394704 @default.
- W2029799715 cites W1978862499 @default.
- W2029799715 cites W1980849816 @default.
- W2029799715 cites W1982413621 @default.
- W2029799715 cites W1983464530 @default.
- W2029799715 cites W1983859811 @default.
- W2029799715 cites W1984068968 @default.
- W2029799715 cites W1984575543 @default.
- W2029799715 cites W1986253113 @default.
- W2029799715 cites W1986867297 @default.
- W2029799715 cites W1990607716 @default.
- W2029799715 cites W1990799615 @default.
- W2029799715 cites W1994049460 @default.
- W2029799715 cites W2003013441 @default.
- W2029799715 cites W2006140607 @default.
- W2029799715 cites W2007716311 @default.
- W2029799715 cites W2010056633 @default.
- W2029799715 cites W2012652160 @default.
- W2029799715 cites W2017031904 @default.
- W2029799715 cites W2020387934 @default.
- W2029799715 cites W2021531827 @default.
- W2029799715 cites W2021753111 @default.
- W2029799715 cites W2026065078 @default.
- W2029799715 cites W2033520577 @default.
- W2029799715 cites W2037060379 @default.
- W2029799715 cites W2038430059 @default.
- W2029799715 cites W2044493643 @default.
- W2029799715 cites W2045147730 @default.
- W2029799715 cites W2051698479 @default.
- W2029799715 cites W2058984034 @default.
- W2029799715 cites W2063002615 @default.
- W2029799715 cites W2064390073 @default.
- W2029799715 cites W2071392501 @default.
- W2029799715 cites W2074296904 @default.
- W2029799715 cites W2078824764 @default.
- W2029799715 cites W2079321830 @default.
- W2029799715 cites W2082585574 @default.
- W2029799715 cites W2083725053 @default.
- W2029799715 cites W2084524194 @default.
- W2029799715 cites W2087304395 @default.
- W2029799715 cites W2109397226 @default.
- W2029799715 cites W2122395441 @default.
- W2029799715 cites W2142748006 @default.
- W2029799715 cites W2509475336 @default.
- W2029799715 cites W2516900506 @default.
- W2029799715 cites W2539958453 @default.
- W2029799715 cites W4241226483 @default.
- W2029799715 doi "https://doi.org/10.1088/0022-3727/41/2/024003" @default.
- W2029799715 hasPublicationYear "2008" @default.
- W2029799715 type Work @default.
- W2029799715 sameAs 2029799715 @default.
- W2029799715 citedByCount "7" @default.
- W2029799715 countsByYear W20297997152013 @default.
- W2029799715 countsByYear W20297997152014 @default.
- W2029799715 countsByYear W20297997152015 @default.
- W2029799715 countsByYear W20297997152016 @default.
- W2029799715 countsByYear W20297997152018 @default.
- W2029799715 countsByYear W20297997152021 @default.
- W2029799715 crossrefType "journal-article" @default.
- W2029799715 hasAuthorship W2029799715A5041684886 @default.
- W2029799715 hasAuthorship W2029799715A5067507479 @default.
- W2029799715 hasConcept C116915560 @default.
- W2029799715 hasConcept C119599485 @default.
- W2029799715 hasConcept C120665830 @default.
- W2029799715 hasConcept C121332964 @default.
- W2029799715 hasConcept C127413603 @default.
- W2029799715 hasConcept C168834538 @default.
- W2029799715 hasConcept C171250308 @default.
- W2029799715 hasConcept C192562407 @default.
- W2029799715 hasConcept C207437497 @default.
- W2029799715 hasConcept C2780841128 @default.
- W2029799715 hasConcept C49040817 @default.
- W2029799715 hasConcept C49110097 @default.
- W2029799715 hasConcept C61696701 @default.
- W2029799715 hasConceptScore W2029799715C116915560 @default.
- W2029799715 hasConceptScore W2029799715C119599485 @default.
- W2029799715 hasConceptScore W2029799715C120665830 @default.
- W2029799715 hasConceptScore W2029799715C121332964 @default.
- W2029799715 hasConceptScore W2029799715C127413603 @default.
- W2029799715 hasConceptScore W2029799715C168834538 @default.
- W2029799715 hasConceptScore W2029799715C171250308 @default.
- W2029799715 hasConceptScore W2029799715C192562407 @default.
- W2029799715 hasConceptScore W2029799715C207437497 @default.
- W2029799715 hasConceptScore W2029799715C2780841128 @default.
- W2029799715 hasConceptScore W2029799715C49040817 @default.
- W2029799715 hasConceptScore W2029799715C49110097 @default.
- W2029799715 hasConceptScore W2029799715C61696701 @default.
- W2029799715 hasIssue "2" @default.