Matches in SemOpenAlex for { <https://semopenalex.org/work/W2029897673> ?p ?o ?g. }
Showing items 1 to 93 of
93
with 100 items per page.
- W2029897673 endingPage "577" @default.
- W2029897673 startingPage "575" @default.
- W2029897673 abstract "The study of indium implantation in silicon has gained considerable interest because of its potential in producing high value resistors in integrated circuits. We have studied the redistribution of indium as a function of high-temperature anneal and dose. While the data show some anomalous redistribution, the bulk of the implanted indium remains undisturbed supporting a trapping mechanism during solid phase epitaxial growth for high-temperature thermal anneals up to 1050 °C." @default.
- W2029897673 created "2016-06-24" @default.
- W2029897673 creator A5008759492 @default.
- W2029897673 creator A5020399089 @default.
- W2029897673 creator A5029909102 @default.
- W2029897673 creator A5042668333 @default.
- W2029897673 date "1983-04-01" @default.
- W2029897673 modified "2023-10-16" @default.
- W2029897673 title "Migration of implanted indium in silicon as a function of thermal annealing" @default.
- W2029897673 cites W1968835258 @default.
- W2029897673 cites W1982642499 @default.
- W2029897673 cites W1989316728 @default.
- W2029897673 cites W2019676541 @default.
- W2029897673 cites W2021916653 @default.
- W2029897673 cites W2022961466 @default.
- W2029897673 cites W2027779490 @default.
- W2029897673 cites W2032696839 @default.
- W2029897673 cites W2073474538 @default.
- W2029897673 cites W2093258414 @default.
- W2029897673 cites W2093665989 @default.
- W2029897673 doi "https://doi.org/10.1063/1.94006" @default.
- W2029897673 hasPublicationYear "1983" @default.
- W2029897673 type Work @default.
- W2029897673 sameAs 2029897673 @default.
- W2029897673 citedByCount "8" @default.
- W2029897673 countsByYear W20298976732013 @default.
- W2029897673 countsByYear W20298976732021 @default.
- W2029897673 crossrefType "journal-article" @default.
- W2029897673 hasAuthorship W2029897673A5008759492 @default.
- W2029897673 hasAuthorship W2029897673A5020399089 @default.
- W2029897673 hasAuthorship W2029897673A5029909102 @default.
- W2029897673 hasAuthorship W2029897673A5042668333 @default.
- W2029897673 hasConcept C110738630 @default.
- W2029897673 hasConcept C145148216 @default.
- W2029897673 hasConcept C171250308 @default.
- W2029897673 hasConcept C17744445 @default.
- W2029897673 hasConcept C178790620 @default.
- W2029897673 hasConcept C185592680 @default.
- W2029897673 hasConcept C18903297 @default.
- W2029897673 hasConcept C191897082 @default.
- W2029897673 hasConcept C192562407 @default.
- W2029897673 hasConcept C199539241 @default.
- W2029897673 hasConcept C2777855556 @default.
- W2029897673 hasConcept C2777924906 @default.
- W2029897673 hasConcept C2779227376 @default.
- W2029897673 hasConcept C41823505 @default.
- W2029897673 hasConcept C49040817 @default.
- W2029897673 hasConcept C543292547 @default.
- W2029897673 hasConcept C544956773 @default.
- W2029897673 hasConcept C74080474 @default.
- W2029897673 hasConcept C86803240 @default.
- W2029897673 hasConcept C94625758 @default.
- W2029897673 hasConceptScore W2029897673C110738630 @default.
- W2029897673 hasConceptScore W2029897673C145148216 @default.
- W2029897673 hasConceptScore W2029897673C171250308 @default.
- W2029897673 hasConceptScore W2029897673C17744445 @default.
- W2029897673 hasConceptScore W2029897673C178790620 @default.
- W2029897673 hasConceptScore W2029897673C185592680 @default.
- W2029897673 hasConceptScore W2029897673C18903297 @default.
- W2029897673 hasConceptScore W2029897673C191897082 @default.
- W2029897673 hasConceptScore W2029897673C192562407 @default.
- W2029897673 hasConceptScore W2029897673C199539241 @default.
- W2029897673 hasConceptScore W2029897673C2777855556 @default.
- W2029897673 hasConceptScore W2029897673C2777924906 @default.
- W2029897673 hasConceptScore W2029897673C2779227376 @default.
- W2029897673 hasConceptScore W2029897673C41823505 @default.
- W2029897673 hasConceptScore W2029897673C49040817 @default.
- W2029897673 hasConceptScore W2029897673C543292547 @default.
- W2029897673 hasConceptScore W2029897673C544956773 @default.
- W2029897673 hasConceptScore W2029897673C74080474 @default.
- W2029897673 hasConceptScore W2029897673C86803240 @default.
- W2029897673 hasConceptScore W2029897673C94625758 @default.
- W2029897673 hasIssue "7" @default.
- W2029897673 hasLocation W20298976731 @default.
- W2029897673 hasOpenAccess W2029897673 @default.
- W2029897673 hasPrimaryLocation W20298976731 @default.
- W2029897673 hasRelatedWork W1516461839 @default.
- W2029897673 hasRelatedWork W1987324620 @default.
- W2029897673 hasRelatedWork W2016175735 @default.
- W2029897673 hasRelatedWork W2065669148 @default.
- W2029897673 hasRelatedWork W2074774518 @default.
- W2029897673 hasRelatedWork W2088968034 @default.
- W2029897673 hasRelatedWork W2093329960 @default.
- W2029897673 hasRelatedWork W2275386326 @default.
- W2029897673 hasRelatedWork W2760098909 @default.
- W2029897673 hasRelatedWork W2935944697 @default.
- W2029897673 hasVolume "42" @default.
- W2029897673 isParatext "false" @default.
- W2029897673 isRetracted "false" @default.
- W2029897673 magId "2029897673" @default.
- W2029897673 workType "article" @default.