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• W2029973652 abstract "The applicability of carbon nanotubes to an electron source for a Bayard–Alpert type vacuum gauge has been investigated. Three gauge configurations are designed to optimize the gauge performance. The optimized gauge, in which an additional shield electrode is fixed on a gate electrode, exhibits good measurement of linearity between ion current and system pressure from 10−7 to 10−2 Pa. A gauge sensitivity of 0.05 Pa−1 has been achieved under 100 μA emission current for nitrogen, comparable with 0.07 Pa−1 of commercial ionization gauges." @default.
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• W2029973652 date "2009-12-01" @default.
• W2029973652 modified "2023-09-26" @default.
• W2029973652 title "Ionization vacuum gauge with a carbon nanotube field electron emitter combined with a shield electrode" @default.
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• W2029973652 doi "https://doi.org/10.1016/j.vacuum.2009.06.016" @default.
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