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- W2030085349 endingPage "1508" @default.
- W2030085349 startingPage "1503" @default.
- W2030085349 abstract "Flip‐chip solder bonding is a suitable technology for applications involving large numbers of interconnections. This technique, also known as controlled collapse solder bonding, was developed several years ago [L. F. Miller, IBM J. Res. Develop. 239 (1969)]. To facilitate reflow and bonding of flip‐chip devices using Pb–Sn solder, a method of removing the surface oxides on the molten solder is required. Conventional liquid fluxes are not desirable due to potentially corrosive residues that may be difficult to remove from the confined geometry between flip‐chip and substrate. Dry processing previously reported [P. A. Moskowitz, H. L. Yeh, and S. K. Ray, J. Vac. Sci. Technol. A 4, 838 (1986)] involves the use of halogen containing gases such as CF2Cl2, CF4 , and SF6 . However, halide residues on the surfaces of treated samples can corrode the solder surface and any other exposed metal when exposed to atmospheric moisture. This paper describes dry reflow and bonding of flip chips using Pb–Sn solder with atomic hydrogen generated in a low‐pressure (≤10−1 Torr) microwave plasma. The atomic hydrogen chemically reduces the native surface oxides allowing the dry soldering process to occur without undesirable etching of the solder surface, or formation of toxic or corrosive residues." @default.
- W2030085349 created "2016-06-24" @default.
- W2030085349 creator A5023391929 @default.
- W2030085349 creator A5030205297 @default.
- W2030085349 creator A5050133073 @default.
- W2030085349 creator A5054630950 @default.
- W2030085349 creator A5086801546 @default.
- W2030085349 date "1990-05-01" @default.
- W2030085349 modified "2023-09-27" @default.
- W2030085349 title "Hydrogen plasmas for flux free flip‐chip solder bonding" @default.
- W2030085349 doi "https://doi.org/10.1116/1.576865" @default.
- W2030085349 hasPublicationYear "1990" @default.
- W2030085349 type Work @default.
- W2030085349 sameAs 2030085349 @default.
- W2030085349 citedByCount "10" @default.
- W2030085349 crossrefType "journal-article" @default.
- W2030085349 hasAuthorship W2030085349A5023391929 @default.
- W2030085349 hasAuthorship W2030085349A5030205297 @default.
- W2030085349 hasAuthorship W2030085349A5050133073 @default.
- W2030085349 hasAuthorship W2030085349A5054630950 @default.
- W2030085349 hasAuthorship W2030085349A5086801546 @default.
- W2030085349 hasConcept C100460472 @default.
- W2030085349 hasConcept C111368507 @default.
- W2030085349 hasConcept C127313418 @default.
- W2030085349 hasConcept C159985019 @default.
- W2030085349 hasConcept C178790620 @default.
- W2030085349 hasConcept C185592680 @default.
- W2030085349 hasConcept C191897082 @default.
- W2030085349 hasConcept C192562407 @default.
- W2030085349 hasConcept C2777289219 @default.
- W2030085349 hasConcept C2778413121 @default.
- W2030085349 hasConcept C2779227376 @default.
- W2030085349 hasConcept C50296614 @default.
- W2030085349 hasConcept C512968161 @default.
- W2030085349 hasConcept C68928338 @default.
- W2030085349 hasConcept C79072407 @default.
- W2030085349 hasConceptScore W2030085349C100460472 @default.
- W2030085349 hasConceptScore W2030085349C111368507 @default.
- W2030085349 hasConceptScore W2030085349C127313418 @default.
- W2030085349 hasConceptScore W2030085349C159985019 @default.
- W2030085349 hasConceptScore W2030085349C178790620 @default.
- W2030085349 hasConceptScore W2030085349C185592680 @default.
- W2030085349 hasConceptScore W2030085349C191897082 @default.
- W2030085349 hasConceptScore W2030085349C192562407 @default.
- W2030085349 hasConceptScore W2030085349C2777289219 @default.
- W2030085349 hasConceptScore W2030085349C2778413121 @default.
- W2030085349 hasConceptScore W2030085349C2779227376 @default.
- W2030085349 hasConceptScore W2030085349C50296614 @default.
- W2030085349 hasConceptScore W2030085349C512968161 @default.
- W2030085349 hasConceptScore W2030085349C68928338 @default.
- W2030085349 hasConceptScore W2030085349C79072407 @default.
- W2030085349 hasIssue "3" @default.
- W2030085349 hasLocation W20300853491 @default.
- W2030085349 hasOpenAccess W2030085349 @default.
- W2030085349 hasPrimaryLocation W20300853491 @default.
- W2030085349 hasRelatedWork W1483740618 @default.
- W2030085349 hasRelatedWork W1985093968 @default.
- W2030085349 hasRelatedWork W2060129974 @default.
- W2030085349 hasRelatedWork W2127841261 @default.
- W2030085349 hasRelatedWork W2135237503 @default.
- W2030085349 hasRelatedWork W2147552846 @default.
- W2030085349 hasRelatedWork W2156526775 @default.
- W2030085349 hasRelatedWork W4205115578 @default.
- W2030085349 hasRelatedWork W4233052666 @default.
- W2030085349 hasRelatedWork W1660269912 @default.
- W2030085349 hasVolume "8" @default.
- W2030085349 isParatext "false" @default.
- W2030085349 isRetracted "false" @default.
- W2030085349 magId "2030085349" @default.
- W2030085349 workType "article" @default.