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- W2030220150 endingPage "499" @default.
- W2030220150 startingPage "496" @default.
- W2030220150 abstract "Abstract The etching processes of multilayered structures based on gallium arsenide have been investigated. Using optical spectroscopy, problems related to the time of the etching transition from one layer to another have been studied. The dependence of gallium arsenide etching rate on the pressure in the discharge chamber and on the discharge current density has been determined. The gallium arsenide surface modified in the process of the reactive ion etching was studied by X-ray photoelectron spectroscopy method." @default.
- W2030220150 created "2016-06-24" @default.
- W2030220150 creator A5013934769 @default.
- W2030220150 creator A5068661332 @default.
- W2030220150 creator A5085102062 @default.
- W2030220150 date "1989-03-01" @default.
- W2030220150 modified "2023-09-30" @default.
- W2030220150 title "Reactive ion etching of gallium arsenide" @default.
- W2030220150 cites W1980038009 @default.
- W2030220150 cites W1993077416 @default.
- W2030220150 doi "https://doi.org/10.1016/0168-583x(89)90834-3" @default.
- W2030220150 hasPublicationYear "1989" @default.
- W2030220150 type Work @default.
- W2030220150 sameAs 2030220150 @default.
- W2030220150 citedByCount "0" @default.
- W2030220150 crossrefType "journal-article" @default.
- W2030220150 hasAuthorship W2030220150A5013934769 @default.
- W2030220150 hasAuthorship W2030220150A5068661332 @default.
- W2030220150 hasAuthorship W2030220150A5085102062 @default.
- W2030220150 hasConcept C100460472 @default.
- W2030220150 hasConcept C130472188 @default.
- W2030220150 hasConcept C145148216 @default.
- W2030220150 hasConcept C171250308 @default.
- W2030220150 hasConcept C178790620 @default.
- W2030220150 hasConcept C185592680 @default.
- W2030220150 hasConcept C191897082 @default.
- W2030220150 hasConcept C192562407 @default.
- W2030220150 hasConcept C2779227376 @default.
- W2030220150 hasConcept C49040817 @default.
- W2030220150 hasConcept C510052550 @default.
- W2030220150 hasConcept C550372918 @default.
- W2030220150 hasConceptScore W2030220150C100460472 @default.
- W2030220150 hasConceptScore W2030220150C130472188 @default.
- W2030220150 hasConceptScore W2030220150C145148216 @default.
- W2030220150 hasConceptScore W2030220150C171250308 @default.
- W2030220150 hasConceptScore W2030220150C178790620 @default.
- W2030220150 hasConceptScore W2030220150C185592680 @default.
- W2030220150 hasConceptScore W2030220150C191897082 @default.
- W2030220150 hasConceptScore W2030220150C192562407 @default.
- W2030220150 hasConceptScore W2030220150C2779227376 @default.
- W2030220150 hasConceptScore W2030220150C49040817 @default.
- W2030220150 hasConceptScore W2030220150C510052550 @default.
- W2030220150 hasConceptScore W2030220150C550372918 @default.
- W2030220150 hasIssue "1-4" @default.
- W2030220150 hasLocation W20302201501 @default.
- W2030220150 hasOpenAccess W2030220150 @default.
- W2030220150 hasPrimaryLocation W20302201501 @default.
- W2030220150 hasRelatedWork W1544613270 @default.
- W2030220150 hasRelatedWork W1980303710 @default.
- W2030220150 hasRelatedWork W2014657994 @default.
- W2030220150 hasRelatedWork W2030220150 @default.
- W2030220150 hasRelatedWork W2054734842 @default.
- W2030220150 hasRelatedWork W2058796300 @default.
- W2030220150 hasRelatedWork W2088563191 @default.
- W2030220150 hasRelatedWork W2102850049 @default.
- W2030220150 hasRelatedWork W2460108074 @default.
- W2030220150 hasRelatedWork W2488963643 @default.
- W2030220150 hasVolume "39" @default.
- W2030220150 isParatext "false" @default.
- W2030220150 isRetracted "false" @default.
- W2030220150 magId "2030220150" @default.
- W2030220150 workType "article" @default.