Matches in SemOpenAlex for { <https://semopenalex.org/work/W2030335849> ?p ?o ?g. }
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- W2030335849 endingPage "359" @default.
- W2030335849 startingPage "349" @default.
- W2030335849 abstract "Abstract In this paper, we present finite element (FE) modeling of thermomechanical stress and deflection of lead zirconate titanate (PZT) actuated micro-mirror taking material anisotropy into account. Including silicon anisotropy in thermomechanical FE simulation resulted in 5% lower stresses and 9% higher deflections than those obtained for isotropic properties of silicon. Piezoelectric simulation with anisotropic properties of both silicon and PZT material has shown lower stresses and higher deflections compared to those obtained with isotropic properties of materials. The thickness of silicon substrate in the diaphragm region has also shown to have a significant influence on the deflection of micro-mirror. The deflection was found to increase dramatically to 133 mrad with the complete removal of silicon substrate. FE modeling taking materials anisotropy into account has proved to serve as an indispensable tool to realize an optimal design of micro-mirror." @default.
- W2030335849 created "2016-06-24" @default.
- W2030335849 creator A5000723708 @default.
- W2030335849 creator A5014045034 @default.
- W2030335849 creator A5048248600 @default.
- W2030335849 creator A5053147288 @default.
- W2030335849 creator A5070744032 @default.
- W2030335849 creator A5082284572 @default.
- W2030335849 date "2010-04-01" @default.
- W2030335849 modified "2023-09-27" @default.
- W2030335849 title "FE modeling of stress and deflection of PZT actuated micro-mirror: Effect of crystal anisotropy" @default.
- W2030335849 cites W1964959993 @default.
- W2030335849 cites W1966551318 @default.
- W2030335849 cites W1975423143 @default.
- W2030335849 cites W1975629737 @default.
- W2030335849 cites W1976662976 @default.
- W2030335849 cites W1980568344 @default.
- W2030335849 cites W1996614127 @default.
- W2030335849 cites W2006174598 @default.
- W2030335849 cites W2046619255 @default.
- W2030335849 cites W2047671001 @default.
- W2030335849 cites W2054824973 @default.
- W2030335849 cites W2057172473 @default.
- W2030335849 cites W2079786074 @default.
- W2030335849 cites W2154833099 @default.
- W2030335849 cites W2159687473 @default.
- W2030335849 cites W2162468741 @default.
- W2030335849 doi "https://doi.org/10.1016/j.commatsci.2010.01.020" @default.
- W2030335849 hasPublicationYear "2010" @default.
- W2030335849 type Work @default.
- W2030335849 sameAs 2030335849 @default.
- W2030335849 citedByCount "7" @default.
- W2030335849 countsByYear W20303358492012 @default.
- W2030335849 countsByYear W20303358492013 @default.
- W2030335849 countsByYear W20303358492021 @default.
- W2030335849 countsByYear W20303358492022 @default.
- W2030335849 countsByYear W20303358492023 @default.
- W2030335849 crossrefType "journal-article" @default.
- W2030335849 hasAuthorship W2030335849A5000723708 @default.
- W2030335849 hasAuthorship W2030335849A5014045034 @default.
- W2030335849 hasAuthorship W2030335849A5048248600 @default.
- W2030335849 hasAuthorship W2030335849A5053147288 @default.
- W2030335849 hasAuthorship W2030335849A5070744032 @default.
- W2030335849 hasAuthorship W2030335849A5082284572 @default.
- W2030335849 hasConcept C120665830 @default.
- W2030335849 hasConcept C121332964 @default.
- W2030335849 hasConcept C138885662 @default.
- W2030335849 hasConcept C159985019 @default.
- W2030335849 hasConcept C192562407 @default.
- W2030335849 hasConcept C199360897 @default.
- W2030335849 hasConcept C21036866 @default.
- W2030335849 hasConcept C26873012 @default.
- W2030335849 hasConcept C2781285689 @default.
- W2030335849 hasConcept C2781355719 @default.
- W2030335849 hasConcept C41008148 @default.
- W2030335849 hasConcept C41895202 @default.
- W2030335849 hasConcept C85725439 @default.
- W2030335849 hasConceptScore W2030335849C120665830 @default.
- W2030335849 hasConceptScore W2030335849C121332964 @default.
- W2030335849 hasConceptScore W2030335849C138885662 @default.
- W2030335849 hasConceptScore W2030335849C159985019 @default.
- W2030335849 hasConceptScore W2030335849C192562407 @default.
- W2030335849 hasConceptScore W2030335849C199360897 @default.
- W2030335849 hasConceptScore W2030335849C21036866 @default.
- W2030335849 hasConceptScore W2030335849C26873012 @default.
- W2030335849 hasConceptScore W2030335849C2781285689 @default.
- W2030335849 hasConceptScore W2030335849C2781355719 @default.
- W2030335849 hasConceptScore W2030335849C41008148 @default.
- W2030335849 hasConceptScore W2030335849C41895202 @default.
- W2030335849 hasConceptScore W2030335849C85725439 @default.
- W2030335849 hasIssue "2" @default.
- W2030335849 hasLocation W20303358491 @default.
- W2030335849 hasOpenAccess W2030335849 @default.
- W2030335849 hasPrimaryLocation W20303358491 @default.
- W2030335849 hasRelatedWork W1994103032 @default.
- W2030335849 hasRelatedWork W2014315543 @default.
- W2030335849 hasRelatedWork W2051270029 @default.
- W2030335849 hasRelatedWork W2082293200 @default.
- W2030335849 hasRelatedWork W2137307547 @default.
- W2030335849 hasRelatedWork W2380293314 @default.
- W2030335849 hasRelatedWork W2943188944 @default.
- W2030335849 hasRelatedWork W3213742838 @default.
- W2030335849 hasRelatedWork W4285802202 @default.
- W2030335849 hasRelatedWork W4287163509 @default.
- W2030335849 hasVolume "48" @default.
- W2030335849 isParatext "false" @default.
- W2030335849 isRetracted "false" @default.
- W2030335849 magId "2030335849" @default.
- W2030335849 workType "article" @default.