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- W2030360250 abstract "We propose a new methodology to de-convolute the intrinsic low-k material and interconnect geometric components from acceleration testing failure data, which allows a straightforward prediction of low-k failure time distributions at use conditions. Our analysis shows the intrinsic porous low-k failure time of Cu damascene interconnect will drop significantly when nominal Cu line spacing below 30nm, with the influence of Cu geometric variability, low-k failure time further degraded depends on the lithography patterning technique used." @default.
- W2030360250 created "2016-06-24" @default.
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- W2030360250 date "2014-06-01" @default.
- W2030360250 modified "2023-09-23" @default.
- W2030360250 title "A new methodology for copper/low-k dielectric reliability prediction" @default.
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- W2030360250 doi "https://doi.org/10.1109/irps.2014.6860612" @default.
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