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• W2030374986 abstract "Cluster C implantation at low temperature has been studied in terms of amorphous Si (a-Si) formation and elimination of B implanted induced end of range defects (EORDs). Thickness of a-Si can be controlled by C equivalent energy and dose. Monomer C never creates a-Si layer at less than 1E15/ cm <sup xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</sup> at 25°C implant. Dose increase and temperature decrease starts to create a-Si layer. On the other hand, cluster C7 implant creates a-Si layer at less than 5E14/cm <sup xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</sup> dose even at 25°C, and −30°C implant increases the a-Si thickness by around 7∼8nm in each C dose. A large amount of EORDs remain in cluster B10 25°C implant sample after RTA at 950°C. The situation does not change a lot with B10 −30°C implant. On the other hand, cluster C7 co-implant with B10 at 25°C, however, greatly reduces EORD density. EORD free can be realized in C7 co-implant with B10 at −30°C. Cluster C7 co-implant at −30°C assists the EORD elimination. Sheet resistance of cluster C and B10 co-implanted at −30°C sample is remarkably low compared with only B10 implanted sample. It can be concluded that cluster C implantation at −30°C is very effective for eliminating EORDs and obtaining high carrier activation." @default.
• W2030374986 created "2016-06-24" @default.
• W2030374986 creator A5000181971 @default.
• W2030374986 creator A5004963627 @default.
• W2030374986 creator A5013976400 @default.
• W2030374986 creator A5016809176 @default.
• W2030374986 creator A5019792391 @default.
• W2030374986 creator A5029994555 @default.
• W2030374986 creator A5033695176 @default.
• W2030374986 creator A5033774895 @default.
• W2030374986 creator A5050598012 @default.
• W2030374986 creator A5061047306 @default.
• W2030374986 creator A5062001295 @default.
• W2030374986 creator A5068713978 @default.
• W2030374986 creator A5069114101 @default.
• W2030374986 creator A5070142339 @default.
• W2030374986 creator A5075626282 @default.
• W2030374986 creator A5077178140 @default.
• W2030374986 creator A5091554050 @default.
• W2030374986 date "2010-09-01" @default.
• W2030374986 modified "2023-09-27" @default.
• W2030374986 title "Effects of cluster carbon implantation at low temperature on damage recovery after rapid thermal annealing" @default.
• W2030374986 cites W1621683689 @default.
• W2030374986 cites W2011892744 @default.
• W2030374986 cites W2012085624 @default.
• W2030374986 doi "https://doi.org/10.1109/rtp.2010.5623605" @default.
• W2030374986 hasPublicationYear "2010" @default.
• W2030374986 type Work @default.
• W2030374986 sameAs 2030374986 @default.
• W2030374986 citedByCount "0" @default.
• W2030374986 crossrefType "proceedings-article" @default.
• W2030374986 hasAuthorship W2030374986A5000181971 @default.
• W2030374986 hasAuthorship W2030374986A5004963627 @default.
• W2030374986 hasAuthorship W2030374986A5013976400 @default.
• W2030374986 hasAuthorship W2030374986A5016809176 @default.
• W2030374986 hasAuthorship W2030374986A5019792391 @default.
• W2030374986 hasAuthorship W2030374986A5029994555 @default.
• W2030374986 hasAuthorship W2030374986A5033695176 @default.
• W2030374986 hasAuthorship W2030374986A5033774895 @default.
• W2030374986 hasAuthorship W2030374986A5050598012 @default.
• W2030374986 hasAuthorship W2030374986A5061047306 @default.
• W2030374986 hasAuthorship W2030374986A5062001295 @default.
• W2030374986 hasAuthorship W2030374986A5068713978 @default.
• W2030374986 hasAuthorship W2030374986A5069114101 @default.
• W2030374986 hasAuthorship W2030374986A5070142339 @default.
• W2030374986 hasAuthorship W2030374986A5075626282 @default.
• W2030374986 hasAuthorship W2030374986A5077178140 @default.
• W2030374986 hasAuthorship W2030374986A5091554050 @default.
• W2030374986 hasConcept C104779481 @default.
• W2030374986 hasConcept C111919701 @default.
• W2030374986 hasConcept C113196181 @default.
• W2030374986 hasConcept C121332964 @default.
• W2030374986 hasConcept C140205800 @default.
• W2030374986 hasConcept C141071460 @default.
• W2030374986 hasConcept C145148216 @default.
• W2030374986 hasConcept C159985019 @default.
• W2030374986 hasConcept C164866538 @default.
• W2030374986 hasConcept C178790620 @default.
• W2030374986 hasConcept C185592680 @default.
• W2030374986 hasConcept C192562407 @default.
• W2030374986 hasConcept C2777855556 @default.
• W2030374986 hasConcept C2781411149 @default.
• W2030374986 hasConcept C39353612 @default.
• W2030374986 hasConcept C41008148 @default.
• W2030374986 hasConcept C41823505 @default.
• W2030374986 hasConcept C56052488 @default.
• W2030374986 hasConcept C71924100 @default.
• W2030374986 hasConcept C8010536 @default.
• W2030374986 hasConcept C97355855 @default.
• W2030374986 hasConceptScore W2030374986C104779481 @default.
• W2030374986 hasConceptScore W2030374986C111919701 @default.
• W2030374986 hasConceptScore W2030374986C113196181 @default.
• W2030374986 hasConceptScore W2030374986C121332964 @default.
• W2030374986 hasConceptScore W2030374986C140205800 @default.
• W2030374986 hasConceptScore W2030374986C141071460 @default.
• W2030374986 hasConceptScore W2030374986C145148216 @default.
• W2030374986 hasConceptScore W2030374986C159985019 @default.
• W2030374986 hasConceptScore W2030374986C164866538 @default.
• W2030374986 hasConceptScore W2030374986C178790620 @default.
• W2030374986 hasConceptScore W2030374986C185592680 @default.
• W2030374986 hasConceptScore W2030374986C192562407 @default.
• W2030374986 hasConceptScore W2030374986C2777855556 @default.
• W2030374986 hasConceptScore W2030374986C2781411149 @default.
• W2030374986 hasConceptScore W2030374986C39353612 @default.
• W2030374986 hasConceptScore W2030374986C41008148 @default.
• W2030374986 hasConceptScore W2030374986C41823505 @default.
• W2030374986 hasConceptScore W2030374986C56052488 @default.
• W2030374986 hasConceptScore W2030374986C71924100 @default.
• W2030374986 hasConceptScore W2030374986C8010536 @default.
• W2030374986 hasConceptScore W2030374986C97355855 @default.
• W2030374986 hasLocation W20303749861 @default.
• W2030374986 hasOpenAccess W2030374986 @default.
• W2030374986 hasPrimaryLocation W20303749861 @default.
• W2030374986 hasRelatedWork W1484318783 @default.
• W2030374986 hasRelatedWork W2012154268 @default.
• W2030374986 hasRelatedWork W2031071574 @default.
• W2030374986 hasRelatedWork W2034397167 @default.
• W2030374986 hasRelatedWork W2036256944 @default.
• W2030374986 hasRelatedWork W2067847322 @default.
• W2030374986 hasRelatedWork W2088081281 @default.

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