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- W2030379750 abstract "The accuracy of conventional interferometric methods for three-dimensional microscopy is limited by errors of intrinsic metrics inside interference microscopes. A simple self-calibration technique is proposed for evaluating linearity errors of an interference microscope in the X- and Y-directions, which result from distortions of the CCD pixel arrays and objective lens. In this self-calibration technique, an inclined flat surface is used as the specimen. Two sets of profile measurement data before and after a small shift of the specimen in the X- or Y-directions are used to obtain the linearity error in each direction. Computer simulations are carried out to analyze the influence of error sources. Experimental results of calibrating a commercially available scanning white light interference microscope are also presented." @default.
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- W2030379750 date "2003-10-01" @default.
- W2030379750 modified "2023-10-14" @default.
- W2030379750 title "Self-calibration of lateral non-linearities of an interference microscope" @default.
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- W2030379750 doi "https://doi.org/10.1016/s0263-2241(03)00049-6" @default.
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