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- W2030403771 abstract "A novel method of the measurement of in-plane displacement is presented. This method includes a heterodyne light source, a moving grating and a lock-in amplifier for phase measurement. The phase variation which resulted from the grating movement is measured by an optical heterodyne interferometer. The short and long displacement can be measured by our method. The theoretical resolution is about 1 pm. If considering the high frequency noise, the measurement error or resolution is about 0.2 nm yet." @default.
- W2030403771 created "2016-06-24" @default.
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- W2030403771 date "2006-11-06" @default.
- W2030403771 modified "2023-09-26" @default.
- W2030403771 title "Heterodyne interferometer for measurement of in-plane displacement with subnanometer resolution" @default.
- W2030403771 doi "https://doi.org/10.1117/12.716145" @default.
- W2030403771 hasPublicationYear "2006" @default.
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