Matches in SemOpenAlex for { <https://semopenalex.org/work/W2030406917> ?p ?o ?g. }
- W2030406917 endingPage "1098" @default.
- W2030406917 startingPage "1093" @default.
- W2030406917 abstract "Highlights: ► High-quality ZnO thin films were deposited at room temperature. ► Effect of O{sub 2} flow and RF sputtering voltages on properties of ZnO films were studied. ► O{sub 2}/Ar ratios played a key role in controlling optical properties of ZnO films. ► Photoluminescence intensity of the ZnO films strongly depended on O{sub 2}/Ar ratios. ► Crystallite size, stress and strain strongly depended on O{sub 2}/Ar ratios. - Abstract: ZnO thin films were deposited onto quartz substrates by radio frequency (RF) reactive magnetron sputtering using a Zn target. The structural and optical properties of the ZnO thin films were investigated comprehensively by X-ray diffraction (XRD), ultraviolet–visible and photoluminescence (PL) measurements. The effects of the oxygen content of the total oxygen–argon mixture and sputtering voltage in the sputtering process on the structural and optical properties of the ZnO films were studied systemically. The microstructural parameters, such as the lattice constant, crystallite size, stress and strain, were also calculated and correlated with the structural and optical properties of the ZnO films. In addition, the results showed that the crystalline quality of ZnO thin films improved with increasing O{sub 2}/Ar gas flow ratio from 2:8 to 8:2. XRD and PL spectroscopy revealedmore » 800 V to be the most appropriate sputtering voltage for ZnO thin film growth. High-quality ZnO films with a good crystalline structure, tunable optical band gap as well as high transmittance could be fabricated easily by RF reactive magnetron sputtering, paving the way to obtaining cost-effective ZnO thin films transparent conducting oxides for optoelectronics applications.« less" @default.
- W2030406917 created "2016-06-24" @default.
- W2030406917 creator A5000296074 @default.
- W2030406917 creator A5052992398 @default.
- W2030406917 creator A5065169920 @default.
- W2030406917 creator A5070540014 @default.
- W2030406917 date "2013-03-01" @default.
- W2030406917 modified "2023-10-16" @default.
- W2030406917 title "Structural and optical characterization of high-quality ZnO thin films deposited by reactive RF magnetron sputtering" @default.
- W2030406917 cites W1668198711 @default.
- W2030406917 cites W1965066257 @default.
- W2030406917 cites W1967652077 @default.
- W2030406917 cites W1974262401 @default.
- W2030406917 cites W1974806170 @default.
- W2030406917 cites W1976433558 @default.
- W2030406917 cites W1980854314 @default.
- W2030406917 cites W1981444071 @default.
- W2030406917 cites W1981448576 @default.
- W2030406917 cites W1986704334 @default.
- W2030406917 cites W2000831547 @default.
- W2030406917 cites W2002093212 @default.
- W2030406917 cites W2002427856 @default.
- W2030406917 cites W2003175376 @default.
- W2030406917 cites W2004529057 @default.
- W2030406917 cites W2005026764 @default.
- W2030406917 cites W2018677613 @default.
- W2030406917 cites W2021437813 @default.
- W2030406917 cites W2022970347 @default.
- W2030406917 cites W2030405287 @default.
- W2030406917 cites W2034259441 @default.
- W2030406917 cites W2039730101 @default.
- W2030406917 cites W2044707700 @default.
- W2030406917 cites W2044960710 @default.
- W2030406917 cites W2045551937 @default.
- W2030406917 cites W2056254129 @default.
- W2030406917 cites W2059603253 @default.
- W2030406917 cites W2059715108 @default.
- W2030406917 cites W2071156780 @default.
- W2030406917 cites W2079662148 @default.
- W2030406917 cites W2083548061 @default.
- W2030406917 cites W2085199238 @default.
- W2030406917 cites W2091906766 @default.
- W2030406917 cites W2093522183 @default.
- W2030406917 cites W2121763892 @default.
- W2030406917 cites W2124529396 @default.
- W2030406917 cites W2127443063 @default.
- W2030406917 cites W2131960130 @default.
- W2030406917 cites W2149599400 @default.
- W2030406917 doi "https://doi.org/10.1016/j.materresbull.2012.11.104" @default.
- W2030406917 hasPublicationYear "2013" @default.
- W2030406917 type Work @default.
- W2030406917 sameAs 2030406917 @default.
- W2030406917 citedByCount "32" @default.
- W2030406917 countsByYear W20304069172013 @default.
- W2030406917 countsByYear W20304069172014 @default.
- W2030406917 countsByYear W20304069172015 @default.
- W2030406917 countsByYear W20304069172016 @default.
- W2030406917 countsByYear W20304069172017 @default.
- W2030406917 countsByYear W20304069172018 @default.
- W2030406917 countsByYear W20304069172019 @default.
- W2030406917 countsByYear W20304069172020 @default.
- W2030406917 countsByYear W20304069172021 @default.
- W2030406917 countsByYear W20304069172022 @default.
- W2030406917 countsByYear W20304069172023 @default.
- W2030406917 crossrefType "journal-article" @default.
- W2030406917 hasAuthorship W2030406917A5000296074 @default.
- W2030406917 hasAuthorship W2030406917A5052992398 @default.
- W2030406917 hasAuthorship W2030406917A5065169920 @default.
- W2030406917 hasAuthorship W2030406917A5070540014 @default.
- W2030406917 hasConcept C121332964 @default.
- W2030406917 hasConcept C123408415 @default.
- W2030406917 hasConcept C171250308 @default.
- W2030406917 hasConcept C19067145 @default.
- W2030406917 hasConcept C192562407 @default.
- W2030406917 hasConcept C22423302 @default.
- W2030406917 hasConcept C2779530757 @default.
- W2030406917 hasConcept C2780841128 @default.
- W2030406917 hasConcept C49040817 @default.
- W2030406917 hasConcept C61427134 @default.
- W2030406917 hasConcept C62520636 @default.
- W2030406917 hasConcept C97892325 @default.
- W2030406917 hasConceptScore W2030406917C121332964 @default.
- W2030406917 hasConceptScore W2030406917C123408415 @default.
- W2030406917 hasConceptScore W2030406917C171250308 @default.
- W2030406917 hasConceptScore W2030406917C19067145 @default.
- W2030406917 hasConceptScore W2030406917C192562407 @default.
- W2030406917 hasConceptScore W2030406917C22423302 @default.
- W2030406917 hasConceptScore W2030406917C2779530757 @default.
- W2030406917 hasConceptScore W2030406917C2780841128 @default.
- W2030406917 hasConceptScore W2030406917C49040817 @default.
- W2030406917 hasConceptScore W2030406917C61427134 @default.
- W2030406917 hasConceptScore W2030406917C62520636 @default.
- W2030406917 hasConceptScore W2030406917C97892325 @default.
- W2030406917 hasFunder F4320309893 @default.
- W2030406917 hasFunder F4320322120 @default.
- W2030406917 hasFunder F4320322349 @default.
- W2030406917 hasIssue "3" @default.
- W2030406917 hasLocation W20304069171 @default.