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- W2030435638 abstract "This paper presents the first demonstration of a high frequency (2.8 GHz), lateral field excited (simple two masks fabrication process), combined lateral-thickness extensional mode of vibration aluminum nitride (AlN) micro-electromechanical systems (MEMS) resonator with unprecedentedly high figure of merit (k <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>t</sub> <sup xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</sup> ·Q> 45). For the first time, a single interdigital electrode was employed to excite a high frequency mode of vibration in an AlN plate (1.5 μm thick) by making use of both the d <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>33</sub> and d <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>31</sub> AlN piezoelectric coefficients. The resulting MEMS resonator showed high quality factor, Q~2000, (thanks to the high quality AlN film directly deposit on top of the Silicon substrate) and the highest electromechanical coupling coefficient ever reported for AlN MEMS resonators employing a single electrode, k <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>t</sub> <sup xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</sup> ~2.5% (thanks to the coherent combination of d <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>33</sub> and d <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>31</sub> coefficients to transduce one single mechanical mode of vibration)." @default.
- W2030435638 created "2016-06-24" @default.
- W2030435638 creator A5040953644 @default.
- W2030435638 creator A5077133118 @default.
- W2030435638 creator A5079504963 @default.
- W2030435638 date "2013-07-01" @default.
- W2030435638 modified "2023-09-23" @default.
- W2030435638 title "A 2.8 GHz combined mode of vibration aluminum nitride MEMS resonator with high figure of merit exceeding 45" @default.
- W2030435638 cites W1513183467 @default.
- W2030435638 cites W1934334701 @default.
- W2030435638 cites W2054457994 @default.
- W2030435638 cites W2063319521 @default.
- W2030435638 cites W2100506356 @default.
- W2030435638 cites W2101380564 @default.
- W2030435638 cites W2114746265 @default.
- W2030435638 cites W2116983180 @default.
- W2030435638 doi "https://doi.org/10.1109/eftf-ifc.2013.6702272" @default.
- W2030435638 hasPublicationYear "2013" @default.
- W2030435638 type Work @default.
- W2030435638 sameAs 2030435638 @default.
- W2030435638 citedByCount "11" @default.
- W2030435638 countsByYear W20304356382015 @default.
- W2030435638 countsByYear W20304356382016 @default.
- W2030435638 countsByYear W20304356382017 @default.
- W2030435638 countsByYear W20304356382019 @default.
- W2030435638 countsByYear W20304356382020 @default.
- W2030435638 countsByYear W20304356382021 @default.
- W2030435638 crossrefType "proceedings-article" @default.
- W2030435638 hasAuthorship W2030435638A5040953644 @default.
- W2030435638 hasAuthorship W2030435638A5077133118 @default.
- W2030435638 hasAuthorship W2030435638A5079504963 @default.
- W2030435638 hasConcept C100082104 @default.
- W2030435638 hasConcept C113196181 @default.
- W2030435638 hasConcept C121332964 @default.
- W2030435638 hasConcept C130277099 @default.
- W2030435638 hasConcept C159985019 @default.
- W2030435638 hasConcept C185592680 @default.
- W2030435638 hasConcept C192562407 @default.
- W2030435638 hasConcept C2777431650 @default.
- W2030435638 hasConcept C37977207 @default.
- W2030435638 hasConcept C43617362 @default.
- W2030435638 hasConcept C49040817 @default.
- W2030435638 hasConcept C544956773 @default.
- W2030435638 hasConcept C86194701 @default.
- W2030435638 hasConcept C97126364 @default.
- W2030435638 hasConceptScore W2030435638C100082104 @default.
- W2030435638 hasConceptScore W2030435638C113196181 @default.
- W2030435638 hasConceptScore W2030435638C121332964 @default.
- W2030435638 hasConceptScore W2030435638C130277099 @default.
- W2030435638 hasConceptScore W2030435638C159985019 @default.
- W2030435638 hasConceptScore W2030435638C185592680 @default.
- W2030435638 hasConceptScore W2030435638C192562407 @default.
- W2030435638 hasConceptScore W2030435638C2777431650 @default.
- W2030435638 hasConceptScore W2030435638C37977207 @default.
- W2030435638 hasConceptScore W2030435638C43617362 @default.
- W2030435638 hasConceptScore W2030435638C49040817 @default.
- W2030435638 hasConceptScore W2030435638C544956773 @default.
- W2030435638 hasConceptScore W2030435638C86194701 @default.
- W2030435638 hasConceptScore W2030435638C97126364 @default.
- W2030435638 hasLocation W20304356381 @default.
- W2030435638 hasOpenAccess W2030435638 @default.
- W2030435638 hasPrimaryLocation W20304356381 @default.
- W2030435638 hasRelatedWork W1969534476 @default.
- W2030435638 hasRelatedWork W2001228859 @default.
- W2030435638 hasRelatedWork W2077165294 @default.
- W2030435638 hasRelatedWork W2106134475 @default.
- W2030435638 hasRelatedWork W2117732859 @default.
- W2030435638 hasRelatedWork W2770264020 @default.
- W2030435638 hasRelatedWork W2800392200 @default.
- W2030435638 hasRelatedWork W2970284397 @default.
- W2030435638 hasRelatedWork W2981189115 @default.
- W2030435638 hasRelatedWork W3094144334 @default.
- W2030435638 isParatext "false" @default.
- W2030435638 isRetracted "false" @default.
- W2030435638 magId "2030435638" @default.
- W2030435638 workType "article" @default.