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- W2030462822 endingPage "647" @default.
- W2030462822 startingPage "639" @default.
- W2030462822 abstract "A thin film measuring system for the online monitoring of semiconductor films during processing with a radio frequency plasma is described. The method is based upon the use of chromatic processing of polychromatic interference signals produced by the thin semiconductor film when illuminated with white light. A description is given of the interpretation of the polychromatic signals produced by interference effects and some typical experimental results are presented to illustrate the capabilities of the technique. The approach utilizes cost effective instrumentation with acceptable time response for real time process control via optical fibre transmission. It is currently being incorporated as part of an intelligent knowledge based system for such process control." @default.
- W2030462822 created "2016-06-24" @default.
- W2030462822 creator A5036624038 @default.
- W2030462822 creator A5040554739 @default.
- W2030462822 creator A5087990861 @default.
- W2030462822 date "1994-06-01" @default.
- W2030462822 modified "2023-09-27" @default.
- W2030462822 title "Chromatic interferometry for an intelligent plasma processing system" @default.
- W2030462822 cites W1968172466 @default.
- W2030462822 cites W2030999651 @default.
- W2030462822 cites W2033291021 @default.
- W2030462822 cites W2094408049 @default.
- W2030462822 cites W2153334291 @default.
- W2030462822 doi "https://doi.org/10.1088/0957-0233/5/6/002" @default.
- W2030462822 hasPublicationYear "1994" @default.
- W2030462822 type Work @default.
- W2030462822 sameAs 2030462822 @default.
- W2030462822 citedByCount "10" @default.
- W2030462822 countsByYear W20304628222012 @default.
- W2030462822 crossrefType "journal-article" @default.
- W2030462822 hasAuthorship W2030462822A5036624038 @default.
- W2030462822 hasAuthorship W2030462822A5040554739 @default.
- W2030462822 hasAuthorship W2030462822A5087990861 @default.
- W2030462822 hasConcept C120665830 @default.
- W2030462822 hasConcept C121332964 @default.
- W2030462822 hasConcept C166689943 @default.
- W2030462822 hasConcept C196956537 @default.
- W2030462822 hasConcept C41008148 @default.
- W2030462822 hasConcept C62520636 @default.
- W2030462822 hasConcept C82706917 @default.
- W2030462822 hasConceptScore W2030462822C120665830 @default.
- W2030462822 hasConceptScore W2030462822C121332964 @default.
- W2030462822 hasConceptScore W2030462822C166689943 @default.
- W2030462822 hasConceptScore W2030462822C196956537 @default.
- W2030462822 hasConceptScore W2030462822C41008148 @default.
- W2030462822 hasConceptScore W2030462822C62520636 @default.
- W2030462822 hasConceptScore W2030462822C82706917 @default.
- W2030462822 hasIssue "6" @default.
- W2030462822 hasLocation W20304628221 @default.
- W2030462822 hasOpenAccess W2030462822 @default.
- W2030462822 hasPrimaryLocation W20304628221 @default.
- W2030462822 hasRelatedWork W2046311181 @default.
- W2030462822 hasRelatedWork W2058218211 @default.
- W2030462822 hasRelatedWork W2059337739 @default.
- W2030462822 hasRelatedWork W2167212912 @default.
- W2030462822 hasRelatedWork W2181929673 @default.
- W2030462822 hasRelatedWork W2318426546 @default.
- W2030462822 hasRelatedWork W2330230543 @default.
- W2030462822 hasRelatedWork W2891516350 @default.
- W2030462822 hasRelatedWork W3023501879 @default.
- W2030462822 hasRelatedWork W3047547641 @default.
- W2030462822 hasVolume "5" @default.
- W2030462822 isParatext "false" @default.
- W2030462822 isRetracted "false" @default.
- W2030462822 magId "2030462822" @default.
- W2030462822 workType "article" @default.