Matches in SemOpenAlex for { <https://semopenalex.org/work/W2030465097> ?p ?o ?g. }
Showing items 1 to 77 of
77
with 100 items per page.
- W2030465097 endingPage "1112" @default.
- W2030465097 startingPage "1110" @default.
- W2030465097 abstract "We propose a nanocomposite resist system that incorporates sub-nm carbon particles into a resist film to enable an ultrathin film resist process for nanometer pattern fabrication. Fullerene (C60) is found to be an excellent material for incorporation in view of its etching resistance, dissolution inhibiting effect, molecular size, and composite preparation. A nanocomposite system of C60 and an electron-beam positive resist, ZEP520, show enhancements in both pattern contrast and etching resistance and provide 50 nm patterns in a 50-nm-thick film with a sensitivity of ∼50 μC/cm2. Furthermore, a C60-incorporated chemically amplified resist, SAL601, shows strong environmental stabilization in postexposure delay (<10% after five days) presumably due to the reduction of free volume in the closely packed nanocomposite film." @default.
- W2030465097 created "2016-06-24" @default.
- W2030465097 creator A5011737090 @default.
- W2030465097 creator A5048967200 @default.
- W2030465097 creator A5065321626 @default.
- W2030465097 date "1997-03-03" @default.
- W2030465097 modified "2023-10-16" @default.
- W2030465097 title "Nanocomposite resist system" @default.
- W2030465097 cites W2012854644 @default.
- W2030465097 cites W2043349730 @default.
- W2030465097 cites W2088277274 @default.
- W2030465097 doi "https://doi.org/10.1063/1.118500" @default.
- W2030465097 hasPublicationYear "1997" @default.
- W2030465097 type Work @default.
- W2030465097 sameAs 2030465097 @default.
- W2030465097 citedByCount "43" @default.
- W2030465097 countsByYear W20304650972012 @default.
- W2030465097 countsByYear W20304650972014 @default.
- W2030465097 countsByYear W20304650972016 @default.
- W2030465097 countsByYear W20304650972017 @default.
- W2030465097 crossrefType "journal-article" @default.
- W2030465097 hasAuthorship W2030465097A5011737090 @default.
- W2030465097 hasAuthorship W2030465097A5048967200 @default.
- W2030465097 hasAuthorship W2030465097A5065321626 @default.
- W2030465097 hasConcept C100460472 @default.
- W2030465097 hasConcept C127413603 @default.
- W2030465097 hasConcept C136525101 @default.
- W2030465097 hasConcept C142724271 @default.
- W2030465097 hasConcept C159985019 @default.
- W2030465097 hasConcept C171250308 @default.
- W2030465097 hasConcept C192562407 @default.
- W2030465097 hasConcept C200274948 @default.
- W2030465097 hasConcept C204787440 @default.
- W2030465097 hasConcept C2779227376 @default.
- W2030465097 hasConcept C42360764 @default.
- W2030465097 hasConcept C53524968 @default.
- W2030465097 hasConcept C71924100 @default.
- W2030465097 hasConcept C77066764 @default.
- W2030465097 hasConcept C88380143 @default.
- W2030465097 hasConcept C92880739 @default.
- W2030465097 hasConceptScore W2030465097C100460472 @default.
- W2030465097 hasConceptScore W2030465097C127413603 @default.
- W2030465097 hasConceptScore W2030465097C136525101 @default.
- W2030465097 hasConceptScore W2030465097C142724271 @default.
- W2030465097 hasConceptScore W2030465097C159985019 @default.
- W2030465097 hasConceptScore W2030465097C171250308 @default.
- W2030465097 hasConceptScore W2030465097C192562407 @default.
- W2030465097 hasConceptScore W2030465097C200274948 @default.
- W2030465097 hasConceptScore W2030465097C204787440 @default.
- W2030465097 hasConceptScore W2030465097C2779227376 @default.
- W2030465097 hasConceptScore W2030465097C42360764 @default.
- W2030465097 hasConceptScore W2030465097C53524968 @default.
- W2030465097 hasConceptScore W2030465097C71924100 @default.
- W2030465097 hasConceptScore W2030465097C77066764 @default.
- W2030465097 hasConceptScore W2030465097C88380143 @default.
- W2030465097 hasConceptScore W2030465097C92880739 @default.
- W2030465097 hasIssue "9" @default.
- W2030465097 hasLocation W20304650971 @default.
- W2030465097 hasOpenAccess W2030465097 @default.
- W2030465097 hasPrimaryLocation W20304650971 @default.
- W2030465097 hasRelatedWork W2008001818 @default.
- W2030465097 hasRelatedWork W2038778804 @default.
- W2030465097 hasRelatedWork W2127556448 @default.
- W2030465097 hasRelatedWork W2132949922 @default.
- W2030465097 hasRelatedWork W2136502888 @default.
- W2030465097 hasRelatedWork W2144086325 @default.
- W2030465097 hasRelatedWork W2884632320 @default.
- W2030465097 hasRelatedWork W2964303512 @default.
- W2030465097 hasRelatedWork W4298206121 @default.
- W2030465097 hasRelatedWork W2018780667 @default.
- W2030465097 hasVolume "70" @default.
- W2030465097 isParatext "false" @default.
- W2030465097 isRetracted "false" @default.
- W2030465097 magId "2030465097" @default.
- W2030465097 workType "article" @default.