Matches in SemOpenAlex for { <https://semopenalex.org/work/W2030614938> ?p ?o ?g. }
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with 100 items per page.
- W2030614938 endingPage "453" @default.
- W2030614938 startingPage "447" @default.
- W2030614938 abstract "The effective diffusivity of substitutional impurities in silicon is reconsidered by involving the point defects. Four basic reactions, including the interstitials and vacancies contributions, are necessary to derive a general formulation of the effective diffusion coefficient. The model has been fitted to data on arsenic diffusion in silicon under nitridation conditions, with a very good agreement. From these experimental results, it has been deduced that arsenic diffuses mostly by a vacancy mechanism with a partial interstitial contribution, which cannot be neglected. It has been also observed that, under these experimental conditions, the point-defects concentrations are a complex function of the observed phosphorus and antimony diffusivities, in contrast with previous approaches. The general behavior of the dopants diffusivities as a function of point-defects concentrations is also presented. This allows the importance of each reaction involved in this analysis to be shown clearly. Finally, the recombination of point defects mediated by dopants pairs has been emphasized over a wide range of conditions for point-defects concentrations." @default.
- W2030614938 created "2016-06-24" @default.
- W2030614938 creator A5050916194 @default.
- W2030614938 creator A5067838157 @default.
- W2030614938 date "1992-07-15" @default.
- W2030614938 modified "2023-09-24" @default.
- W2030614938 title "Interactions between dopants and point defects during nitridation processes" @default.
- W2030614938 cites W1967818062 @default.
- W2030614938 cites W1972382242 @default.
- W2030614938 cites W1991519782 @default.
- W2030614938 cites W1991522904 @default.
- W2030614938 cites W1996348678 @default.
- W2030614938 cites W2029090790 @default.
- W2030614938 cites W2042962925 @default.
- W2030614938 cites W2075497278 @default.
- W2030614938 cites W2077623365 @default.
- W2030614938 cites W2077994487 @default.
- W2030614938 cites W2080862533 @default.
- W2030614938 cites W2084313831 @default.
- W2030614938 cites W2087067569 @default.
- W2030614938 cites W2088583979 @default.
- W2030614938 cites W2168462720 @default.
- W2030614938 doi "https://doi.org/10.1063/1.351873" @default.
- W2030614938 hasPublicationYear "1992" @default.
- W2030614938 type Work @default.
- W2030614938 sameAs 2030614938 @default.
- W2030614938 citedByCount "8" @default.
- W2030614938 countsByYear W20306149382012 @default.
- W2030614938 crossrefType "journal-article" @default.
- W2030614938 hasAuthorship W2030614938A5050916194 @default.
- W2030614938 hasAuthorship W2030614938A5067838157 @default.
- W2030614938 hasConcept C114221277 @default.
- W2030614938 hasConcept C121332964 @default.
- W2030614938 hasConcept C159467904 @default.
- W2030614938 hasConcept C164675345 @default.
- W2030614938 hasConcept C178790620 @default.
- W2030614938 hasConcept C185592680 @default.
- W2030614938 hasConcept C191897082 @default.
- W2030614938 hasConcept C191952053 @default.
- W2030614938 hasConcept C192562407 @default.
- W2030614938 hasConcept C37668627 @default.
- W2030614938 hasConcept C49040817 @default.
- W2030614938 hasConcept C502230775 @default.
- W2030614938 hasConcept C541565711 @default.
- W2030614938 hasConcept C544956773 @default.
- W2030614938 hasConcept C57863236 @default.
- W2030614938 hasConcept C69357855 @default.
- W2030614938 hasConcept C71987851 @default.
- W2030614938 hasConcept C8010536 @default.
- W2030614938 hasConcept C97355855 @default.
- W2030614938 hasConceptScore W2030614938C114221277 @default.
- W2030614938 hasConceptScore W2030614938C121332964 @default.
- W2030614938 hasConceptScore W2030614938C159467904 @default.
- W2030614938 hasConceptScore W2030614938C164675345 @default.
- W2030614938 hasConceptScore W2030614938C178790620 @default.
- W2030614938 hasConceptScore W2030614938C185592680 @default.
- W2030614938 hasConceptScore W2030614938C191897082 @default.
- W2030614938 hasConceptScore W2030614938C191952053 @default.
- W2030614938 hasConceptScore W2030614938C192562407 @default.
- W2030614938 hasConceptScore W2030614938C37668627 @default.
- W2030614938 hasConceptScore W2030614938C49040817 @default.
- W2030614938 hasConceptScore W2030614938C502230775 @default.
- W2030614938 hasConceptScore W2030614938C541565711 @default.
- W2030614938 hasConceptScore W2030614938C544956773 @default.
- W2030614938 hasConceptScore W2030614938C57863236 @default.
- W2030614938 hasConceptScore W2030614938C69357855 @default.
- W2030614938 hasConceptScore W2030614938C71987851 @default.
- W2030614938 hasConceptScore W2030614938C8010536 @default.
- W2030614938 hasConceptScore W2030614938C97355855 @default.
- W2030614938 hasIssue "2" @default.
- W2030614938 hasLocation W20306149381 @default.
- W2030614938 hasOpenAccess W2030614938 @default.
- W2030614938 hasPrimaryLocation W20306149381 @default.
- W2030614938 hasRelatedWork W1977935904 @default.
- W2030614938 hasRelatedWork W2013725732 @default.
- W2030614938 hasRelatedWork W2035709483 @default.
- W2030614938 hasRelatedWork W2038787436 @default.
- W2030614938 hasRelatedWork W2045674054 @default.
- W2030614938 hasRelatedWork W2053699186 @default.
- W2030614938 hasRelatedWork W2079256385 @default.
- W2030614938 hasRelatedWork W2084246244 @default.
- W2030614938 hasRelatedWork W2087658550 @default.
- W2030614938 hasRelatedWork W4214938698 @default.
- W2030614938 hasVolume "72" @default.
- W2030614938 isParatext "false" @default.
- W2030614938 isRetracted "false" @default.
- W2030614938 magId "2030614938" @default.
- W2030614938 workType "article" @default.