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- W2030616700 abstract "A model taking into consideration the refractive index inhomogeneity and surface roughness of a film was proposed for the simultaneous determination of the optical constants, thickness, and surface roughness of a single-layer thin film from spectrophotometric measurements. In the model, the rough surface was treated as an effective absorbing layer. The model was applied to determine simultaneously the parameters of single-layer MgF2 thin films deposited on fused silica substrates by the oblique-angle deposition technique. The film thicknesses and rms surface roughnesses extracted from spectrophotometric measurements with the proposed model were in good agreement with the values measured by a spectroscopic ellipsometer and an atomic force microscope, respectively." @default.
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- W2030616700 date "2012-12-20" @default.
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- W2030616700 title "Simultaneous determination of optical constants, thickness, and surface roughness of thin film from spectrophotometric measurements" @default.
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- W2030616700 doi "https://doi.org/10.1364/ol.38.000040" @default.
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