Matches in SemOpenAlex for { <https://semopenalex.org/work/W2030645338> ?p ?o ?g. }
Showing items 1 to 93 of
93
with 100 items per page.
- W2030645338 endingPage "C1C20" @default.
- W2030645338 startingPage "C1C15" @default.
- W2030645338 abstract "Photoreflectance (PR) provides an optical means for rapid and precise measurement of near-surface electric fields in semiconductor materials. This article details the use of PR to characterize dopant activation in ultrashallow junction (USJ) structures formed using millisecond annealing processes. USJ structures were formed in silicon using 500eV B implantation with a dose of 1015∕cm2, followed by flash anneals at 1250–1350°C. Reference metrology was performed using secondary ion mass spectrometry and various sheet resistance (Rs) methods. Methods to calibrate PR signals to active carrier concentration in USJ structures, including halo-doped samples, are described. PR is shown to be highly sensitive to active dopant concentrations in USJ structures formed by millisecond annealing." @default.
- W2030645338 created "2016-06-24" @default.
- W2030645338 creator A5002210462 @default.
- W2030645338 creator A5012872742 @default.
- W2030645338 creator A5013590239 @default.
- W2030645338 date "2010-01-01" @default.
- W2030645338 modified "2023-10-16" @default.
- W2030645338 title "Photoreflectance characterization of ultrashallow junction activation in millisecond annealing" @default.
- W2030645338 cites W1979773390 @default.
- W2030645338 cites W1985500520 @default.
- W2030645338 cites W1990552252 @default.
- W2030645338 cites W2000199128 @default.
- W2030645338 cites W2001506286 @default.
- W2030645338 cites W2020644237 @default.
- W2030645338 cites W2059986228 @default.
- W2030645338 cites W2070993176 @default.
- W2030645338 cites W2077825146 @default.
- W2030645338 doi "https://doi.org/10.1116/1.3253327" @default.
- W2030645338 hasPublicationYear "2010" @default.
- W2030645338 type Work @default.
- W2030645338 sameAs 2030645338 @default.
- W2030645338 citedByCount "6" @default.
- W2030645338 countsByYear W20306453382012 @default.
- W2030645338 countsByYear W20306453382018 @default.
- W2030645338 countsByYear W20306453382023 @default.
- W2030645338 crossrefType "journal-article" @default.
- W2030645338 hasAuthorship W2030645338A5002210462 @default.
- W2030645338 hasAuthorship W2030645338A5012872742 @default.
- W2030645338 hasAuthorship W2030645338A5013590239 @default.
- W2030645338 hasBestOaLocation W20306453381 @default.
- W2030645338 hasConcept C108225325 @default.
- W2030645338 hasConcept C113196181 @default.
- W2030645338 hasConcept C121332964 @default.
- W2030645338 hasConcept C1276947 @default.
- W2030645338 hasConcept C145148216 @default.
- W2030645338 hasConcept C159985019 @default.
- W2030645338 hasConcept C171250308 @default.
- W2030645338 hasConcept C178790620 @default.
- W2030645338 hasConcept C185592680 @default.
- W2030645338 hasConcept C191952053 @default.
- W2030645338 hasConcept C192562407 @default.
- W2030645338 hasConcept C2777855556 @default.
- W2030645338 hasConcept C2779227376 @default.
- W2030645338 hasConcept C2780081452 @default.
- W2030645338 hasConcept C41823505 @default.
- W2030645338 hasConcept C43617362 @default.
- W2030645338 hasConcept C49040817 @default.
- W2030645338 hasConcept C544956773 @default.
- W2030645338 hasConcept C57863236 @default.
- W2030645338 hasConcept C60327585 @default.
- W2030645338 hasConcept C66825105 @default.
- W2030645338 hasConceptScore W2030645338C108225325 @default.
- W2030645338 hasConceptScore W2030645338C113196181 @default.
- W2030645338 hasConceptScore W2030645338C121332964 @default.
- W2030645338 hasConceptScore W2030645338C1276947 @default.
- W2030645338 hasConceptScore W2030645338C145148216 @default.
- W2030645338 hasConceptScore W2030645338C159985019 @default.
- W2030645338 hasConceptScore W2030645338C171250308 @default.
- W2030645338 hasConceptScore W2030645338C178790620 @default.
- W2030645338 hasConceptScore W2030645338C185592680 @default.
- W2030645338 hasConceptScore W2030645338C191952053 @default.
- W2030645338 hasConceptScore W2030645338C192562407 @default.
- W2030645338 hasConceptScore W2030645338C2777855556 @default.
- W2030645338 hasConceptScore W2030645338C2779227376 @default.
- W2030645338 hasConceptScore W2030645338C2780081452 @default.
- W2030645338 hasConceptScore W2030645338C41823505 @default.
- W2030645338 hasConceptScore W2030645338C43617362 @default.
- W2030645338 hasConceptScore W2030645338C49040817 @default.
- W2030645338 hasConceptScore W2030645338C544956773 @default.
- W2030645338 hasConceptScore W2030645338C57863236 @default.
- W2030645338 hasConceptScore W2030645338C60327585 @default.
- W2030645338 hasConceptScore W2030645338C66825105 @default.
- W2030645338 hasIssue "1" @default.
- W2030645338 hasLocation W20306453381 @default.
- W2030645338 hasOpenAccess W2030645338 @default.
- W2030645338 hasPrimaryLocation W20306453381 @default.
- W2030645338 hasRelatedWork W1966205888 @default.
- W2030645338 hasRelatedWork W1968749204 @default.
- W2030645338 hasRelatedWork W1976252060 @default.
- W2030645338 hasRelatedWork W2035934669 @default.
- W2030645338 hasRelatedWork W2042905954 @default.
- W2030645338 hasRelatedWork W2052759331 @default.
- W2030645338 hasRelatedWork W2082713480 @default.
- W2030645338 hasRelatedWork W2109982910 @default.
- W2030645338 hasRelatedWork W2135406031 @default.
- W2030645338 hasRelatedWork W2154037258 @default.
- W2030645338 hasVolume "28" @default.
- W2030645338 isParatext "false" @default.
- W2030645338 isRetracted "false" @default.
- W2030645338 magId "2030645338" @default.
- W2030645338 workType "article" @default.