Matches in SemOpenAlex for { <https://semopenalex.org/work/W2030741195> ?p ?o ?g. }
Showing items 1 to 84 of
84
with 100 items per page.
- W2030741195 endingPage "319" @default.
- W2030741195 startingPage "318" @default.
- W2030741195 abstract "Laser induced fluorescence has been used to detect ground-state CF and CF2 radicals in a CF4/O2 plasma etching reactor. Measurements are reported of the spatial variation of CF2 concentrations, of the CF radical rotational state distributions, and of the variation of both species with O2 content of the plasma." @default.
- W2030741195 created "2016-06-24" @default.
- W2030741195 creator A5006074556 @default.
- W2030741195 creator A5053402889 @default.
- W2030741195 creator A5085305605 @default.
- W2030741195 date "1987-02-09" @default.
- W2030741195 modified "2023-10-04" @default.
- W2030741195 title "Laser induced fluorescence detection of CF and CF2 radicals in a CF4/O2 plasma" @default.
- W2030741195 cites W1995344598 @default.
- W2030741195 cites W1996040793 @default.
- W2030741195 cites W2002286651 @default.
- W2030741195 cites W2021580733 @default.
- W2030741195 cites W2048916710 @default.
- W2030741195 cites W2051177279 @default.
- W2030741195 cites W2057703024 @default.
- W2030741195 cites W2064464896 @default.
- W2030741195 cites W2072840158 @default.
- W2030741195 cites W2073197152 @default.
- W2030741195 cites W2092869545 @default.
- W2030741195 cites W2126706485 @default.
- W2030741195 cites W2168793340 @default.
- W2030741195 cites W2335326221 @default.
- W2030741195 doi "https://doi.org/10.1063/1.98214" @default.
- W2030741195 hasPublicationYear "1987" @default.
- W2030741195 type Work @default.
- W2030741195 sameAs 2030741195 @default.
- W2030741195 citedByCount "53" @default.
- W2030741195 countsByYear W20307411952012 @default.
- W2030741195 countsByYear W20307411952020 @default.
- W2030741195 crossrefType "journal-article" @default.
- W2030741195 hasAuthorship W2030741195A5006074556 @default.
- W2030741195 hasAuthorship W2030741195A5053402889 @default.
- W2030741195 hasAuthorship W2030741195A5085305605 @default.
- W2030741195 hasConcept C107872376 @default.
- W2030741195 hasConcept C113196181 @default.
- W2030741195 hasConcept C120665830 @default.
- W2030741195 hasConcept C121332964 @default.
- W2030741195 hasConcept C1342733 @default.
- W2030741195 hasConcept C139066938 @default.
- W2030741195 hasConcept C178790620 @default.
- W2030741195 hasConcept C184779094 @default.
- W2030741195 hasConcept C185592680 @default.
- W2030741195 hasConcept C520434653 @default.
- W2030741195 hasConcept C62520636 @default.
- W2030741195 hasConcept C69523127 @default.
- W2030741195 hasConcept C75473681 @default.
- W2030741195 hasConcept C82706917 @default.
- W2030741195 hasConcept C91881484 @default.
- W2030741195 hasConceptScore W2030741195C107872376 @default.
- W2030741195 hasConceptScore W2030741195C113196181 @default.
- W2030741195 hasConceptScore W2030741195C120665830 @default.
- W2030741195 hasConceptScore W2030741195C121332964 @default.
- W2030741195 hasConceptScore W2030741195C1342733 @default.
- W2030741195 hasConceptScore W2030741195C139066938 @default.
- W2030741195 hasConceptScore W2030741195C178790620 @default.
- W2030741195 hasConceptScore W2030741195C184779094 @default.
- W2030741195 hasConceptScore W2030741195C185592680 @default.
- W2030741195 hasConceptScore W2030741195C520434653 @default.
- W2030741195 hasConceptScore W2030741195C62520636 @default.
- W2030741195 hasConceptScore W2030741195C69523127 @default.
- W2030741195 hasConceptScore W2030741195C75473681 @default.
- W2030741195 hasConceptScore W2030741195C82706917 @default.
- W2030741195 hasConceptScore W2030741195C91881484 @default.
- W2030741195 hasIssue "6" @default.
- W2030741195 hasLocation W20307411951 @default.
- W2030741195 hasOpenAccess W2030741195 @default.
- W2030741195 hasPrimaryLocation W20307411951 @default.
- W2030741195 hasRelatedWork W1969404129 @default.
- W2030741195 hasRelatedWork W1995740319 @default.
- W2030741195 hasRelatedWork W2021646653 @default.
- W2030741195 hasRelatedWork W2023179885 @default.
- W2030741195 hasRelatedWork W2076913260 @default.
- W2030741195 hasRelatedWork W2360555823 @default.
- W2030741195 hasRelatedWork W2409754106 @default.
- W2030741195 hasRelatedWork W2555708335 @default.
- W2030741195 hasRelatedWork W2949302172 @default.
- W2030741195 hasRelatedWork W2949777230 @default.
- W2030741195 hasVolume "50" @default.
- W2030741195 isParatext "false" @default.
- W2030741195 isRetracted "false" @default.
- W2030741195 magId "2030741195" @default.
- W2030741195 workType "article" @default.