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- W2030807696 abstract "Rapid and contactless defect characterization is a very desirable goal in most current technologies. We will describe the contactless, resonant-coupled photoconductive decay (RCPCD) technique, as applied to a variety of wafer and thin-film materials. Using this technique, we can measure recombination lifetime over many decades of injection level. We can also measure relative values of minority-carrier mobility and diffusion length. By scanning the excitation wavelength, we can measure spectral response and photoconductive excitation spectra. Deep-level impurities can also be detected by several variations of RCPCD. We will show the general versatility of this technique." @default.
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- W2030807696 date "2003-09-01" @default.
- W2030807696 modified "2023-09-25" @default.
- W2030807696 title "An advanced technique for measuring minority-carrier parameters and defect properties of semiconductors" @default.
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- W2030807696 doi "https://doi.org/10.1016/s0921-5107(02)00639-6" @default.
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