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- W2030834823 abstract "The structural characteristics of InAlAs/InGaAs films grown in plasma etched wells by molecular beam epitaxy have been analyzed by transmission electron microscopy. While the density of defects in the layer grown inside the well is comparable to the one obtained in layers grown in non-patterned substrates, a high density of defects, originated by the faceting properties of the growth, is observed near the window's edge." @default.
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- W2030834823 date "1994-12-01" @default.
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- W2030834823 title "TEM analysis of InGaAs/InAlAs epitaxial layers grown over InP patterned substrates" @default.
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- W2030834823 doi "https://doi.org/10.1016/0167-577x(94)90243-7" @default.
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