FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2030842899> ?p ?o ?g. }

• W2030842899 endingPage "247" @default.
• W2030842899 startingPage "243" @default.
• W2030842899 abstract "We investigated the process integration of shallow junctions' formation and titanium silicidation. Junctions were doped with boron or arsenic during diffusion in rapid thermal processing (RTP). Dopant sources were in the form of pure layers of B or As deposited on the silicon substrate by e-beam evaporation or molecular beam epitaxy (MBE), respectively. Contact formation to the junctions was preceded by Ti deposition, either on a sacrificial layer of amorphous silicon or directly on the dopant layer. We studied the role of dopant–metal compound formation as a diffusion barrier to prevent junction degradation during the silicidation process. Such a barrier completely stops silicide formation in the case of B but is less efficient for the As doping. It also impedes boron diffusion into the silicon substrate much more than arsenic diffusion. A standard process sequence, where the junction is formed first and silicidation follows, and a modified process flow, where silicidation is done in situ together with the junction doping lead to differences in the fabricated structures. Various analytical techniques such as secondary ion mass spectroscopy (SIMS), Auger electron spectroscopy (AES), Rutherford backscattering spectroscopy (RBS), spreading resistance profiling (SRP), cross-section transmission electron microscopy (XTEM) and four-point probe were used for junction characterization." @default.
• W2030842899 created "2016-06-24" @default.
• W2030842899 creator A5029915887 @default.
• W2030842899 creator A5030197554 @default.
• W2030842899 creator A5040888036 @default.
• W2030842899 creator A5050739438 @default.
• W2030842899 creator A5054274557 @default.
• W2030842899 creator A5067595914 @default.
• W2030842899 creator A5068768118 @default.
• W2030842899 creator A5080349500 @default.
• W2030842899 creator A5081512470 @default.
• W2030842899 date "1998-12-01" @default.
• W2030842899 modified "2023-09-23" @default.
• W2030842899 title "Formation of contacts to shallow junctions using titanium silicide with diffusion barriers" @default.
• W2030842899 cites W1576464698 @default.
• W2030842899 cites W2001652497 @default.
• W2030842899 cites W2004822714 @default.
• W2030842899 cites W2005794190 @default.
• W2030842899 cites W2039074638 @default.
• W2030842899 cites W2072635867 @default.
• W2030842899 cites W2075684266 @default.
• W2030842899 cites W2087910773 @default.
• W2030842899 cites W2095630138 @default.
• W2030842899 cites W2106569406 @default.
• W2030842899 cites W2270222656 @default.
• W2030842899 cites W1963619758 @default.
• W2030842899 doi "https://doi.org/10.1016/s1369-8001(98)00047-x" @default.
• W2030842899 hasPublicationYear "1998" @default.
• W2030842899 type Work @default.
• W2030842899 sameAs 2030842899 @default.
• W2030842899 citedByCount "3" @default.
• W2030842899 crossrefType "journal-article" @default.
• W2030842899 hasAuthorship W2030842899A5029915887 @default.
• W2030842899 hasAuthorship W2030842899A5030197554 @default.
• W2030842899 hasAuthorship W2030842899A5040888036 @default.
• W2030842899 hasAuthorship W2030842899A5050739438 @default.
• W2030842899 hasAuthorship W2030842899A5054274557 @default.
• W2030842899 hasAuthorship W2030842899A5067595914 @default.
• W2030842899 hasAuthorship W2030842899A5068768118 @default.
• W2030842899 hasAuthorship W2030842899A5080349500 @default.
• W2030842899 hasAuthorship W2030842899A5081512470 @default.
• W2030842899 hasConcept C111368507 @default.
• W2030842899 hasConcept C113196181 @default.
• W2030842899 hasConcept C121332964 @default.
• W2030842899 hasConcept C127313418 @default.
• W2030842899 hasConcept C162356407 @default.
• W2030842899 hasConcept C171250308 @default.
• W2030842899 hasConcept C178790620 @default.
• W2030842899 hasConcept C185544564 @default.
• W2030842899 hasConcept C185592680 @default.
• W2030842899 hasConcept C191952053 @default.
• W2030842899 hasConcept C192562407 @default.
• W2030842899 hasConcept C207521374 @default.
• W2030842899 hasConcept C25442681 @default.
• W2030842899 hasConcept C2777289219 @default.
• W2030842899 hasConcept C2778836790 @default.
• W2030842899 hasConcept C2779227376 @default.
• W2030842899 hasConcept C2779833192 @default.
• W2030842899 hasConcept C2780081452 @default.
• W2030842899 hasConcept C2780901251 @default.
• W2030842899 hasConcept C43617362 @default.
• W2030842899 hasConcept C49040817 @default.
• W2030842899 hasConcept C501308230 @default.
• W2030842899 hasConcept C544956773 @default.
• W2030842899 hasConcept C57863236 @default.
• W2030842899 hasConcept C77671233 @default.
• W2030842899 hasConceptScore W2030842899C111368507 @default.
• W2030842899 hasConceptScore W2030842899C113196181 @default.
• W2030842899 hasConceptScore W2030842899C121332964 @default.
• W2030842899 hasConceptScore W2030842899C127313418 @default.
• W2030842899 hasConceptScore W2030842899C162356407 @default.
• W2030842899 hasConceptScore W2030842899C171250308 @default.
• W2030842899 hasConceptScore W2030842899C178790620 @default.
• W2030842899 hasConceptScore W2030842899C185544564 @default.
• W2030842899 hasConceptScore W2030842899C185592680 @default.
• W2030842899 hasConceptScore W2030842899C191952053 @default.
• W2030842899 hasConceptScore W2030842899C192562407 @default.
• W2030842899 hasConceptScore W2030842899C207521374 @default.
• W2030842899 hasConceptScore W2030842899C25442681 @default.
• W2030842899 hasConceptScore W2030842899C2777289219 @default.
• W2030842899 hasConceptScore W2030842899C2778836790 @default.
• W2030842899 hasConceptScore W2030842899C2779227376 @default.
• W2030842899 hasConceptScore W2030842899C2779833192 @default.
• W2030842899 hasConceptScore W2030842899C2780081452 @default.
• W2030842899 hasConceptScore W2030842899C2780901251 @default.
• W2030842899 hasConceptScore W2030842899C43617362 @default.
• W2030842899 hasConceptScore W2030842899C49040817 @default.
• W2030842899 hasConceptScore W2030842899C501308230 @default.
• W2030842899 hasConceptScore W2030842899C544956773 @default.
• W2030842899 hasConceptScore W2030842899C57863236 @default.
• W2030842899 hasConceptScore W2030842899C77671233 @default.
• W2030842899 hasIssue "3-4" @default.
• W2030842899 hasLocation W20308428991 @default.
• W2030842899 hasOpenAccess W2030842899 @default.
• W2030842899 hasPrimaryLocation W20308428991 @default.
• W2030842899 hasRelatedWork W1966205888 @default.
• W2030842899 hasRelatedWork W1988245999 @default.
• W2030842899 hasRelatedWork W2030842899 @default.

• next