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• W2030861372 endingPage "227" @default.
• W2030861372 startingPage "217" @default.
• W2030861372 abstract "Abstract The substitution of alternative gate dielectrics for thermally-grown SiO 2 and nitrided SiO 2 in aggressively scaled devices requires a significant processing change in going from thermally-grown to deposited dielectrics. This requires separate and independent steps for (i) the formation of Si-dielectric interface and (ii) the deposition of the dielectric thin film, which can be (a) Si nitride, or a Si oxynitride alloy, or (b) a high- k oxide. It is demonstrated that ultra-thin, nitrided Si–SiO 2 interface layers prepared by 300°C remote plasma processing can be effective in insulating device performance and reliability from deleterious effects associated direct deposition of alternative dielectric materials directly on to hydrogen-terminated Si surfaces. These interfaces perform equally well with Si nitride, Si oxynitride and high- k oxides, and contribute approximately 0.3–0.4 nm to the overall electrical oxide thickness (EOT), limiting aggressive scaling of EOT to approximately 0.6 nm." @default.
• W2030861372 created "2016-06-24" @default.
• W2030861372 creator A5016440154 @default.
• W2030861372 creator A5030018313 @default.
• W2030861372 creator A5058753970 @default.
• W2030861372 creator A5078803237 @default.
• W2030861372 date "2000-10-01" @default.
• W2030861372 modified "2023-09-30" @default.
• W2030861372 title "Plasma processed ultra-thin SiO2 interfaces for advanced silicon NMOS and PMOS devices: applications to Si-oxide/Si oxynitride, Si-oxide/Si nitride and Si-oxide/transition metal oxide stacked gate dielectrics" @default.
• W2030861372 cites W1966615123 @default.
• W2030861372 cites W1972835610 @default.
• W2030861372 cites W1990258315 @default.
• W2030861372 cites W1999160597 @default.
• W2030861372 cites W2001121097 @default.
• W2030861372 cites W2022328095 @default.
• W2030861372 cites W2030881929 @default.
• W2030861372 cites W2034186947 @default.
• W2030861372 cites W2034527841 @default.
• W2030861372 cites W2035454042 @default.
• W2030861372 cites W2038976056 @default.
• W2030861372 cites W2050875535 @default.
• W2030861372 cites W2051134680 @default.
• W2030861372 cites W2053039815 @default.
• W2030861372 cites W2053322905 @default.
• W2030861372 cites W2058453357 @default.
• W2030861372 cites W2082305984 @default.
• W2030861372 cites W2084356361 @default.
• W2030861372 cites W2100815854 @default.
• W2030861372 cites W2101865576 @default.
• W2030861372 cites W2118838558 @default.
• W2030861372 cites W2123939604 @default.
• W2030861372 cites W2132087474 @default.
• W2030861372 cites W2132172629 @default.
• W2030861372 cites W2162467198 @default.
• W2030861372 cites W2320777256 @default.
• W2030861372 cites W2533115933 @default.
• W2030861372 cites W2537024055 @default.
• W2030861372 cites W2537244439 @default.
• W2030861372 cites W2063005126 @default.
• W2030861372 doi "https://doi.org/10.1016/s0040-6090(00)01153-6" @default.
• W2030861372 hasPublicationYear "2000" @default.
• W2030861372 type Work @default.
• W2030861372 sameAs 2030861372 @default.
• W2030861372 citedByCount "9" @default.
• W2030861372 countsByYear W20308613722014 @default.
• W2030861372 countsByYear W20308613722016 @default.
• W2030861372 countsByYear W20308613722022 @default.
• W2030861372 crossrefType "journal-article" @default.
• W2030861372 hasAuthorship W2030861372A5016440154 @default.
• W2030861372 hasAuthorship W2030861372A5030018313 @default.
• W2030861372 hasAuthorship W2030861372A5058753970 @default.
• W2030861372 hasAuthorship W2030861372A5078803237 @default.
• W2030861372 hasConcept C119599485 @default.
• W2030861372 hasConcept C127413603 @default.
• W2030861372 hasConcept C165801399 @default.
• W2030861372 hasConcept C171250308 @default.
• W2030861372 hasConcept C172385210 @default.
• W2030861372 hasConcept C191897082 @default.
• W2030861372 hasConcept C192562407 @default.
• W2030861372 hasConcept C194760766 @default.
• W2030861372 hasConcept C197162436 @default.
• W2030861372 hasConcept C2361726 @default.
• W2030861372 hasConcept C27050352 @default.
• W2030861372 hasConcept C2777431650 @default.
• W2030861372 hasConcept C2779105228 @default.
• W2030861372 hasConcept C2779227376 @default.
• W2030861372 hasConcept C2779851234 @default.
• W2030861372 hasConcept C49040817 @default.
• W2030861372 hasConcept C52780932 @default.
• W2030861372 hasConcept C544956773 @default.
• W2030861372 hasConceptScore W2030861372C119599485 @default.
• W2030861372 hasConceptScore W2030861372C127413603 @default.
• W2030861372 hasConceptScore W2030861372C165801399 @default.
• W2030861372 hasConceptScore W2030861372C171250308 @default.
• W2030861372 hasConceptScore W2030861372C172385210 @default.
• W2030861372 hasConceptScore W2030861372C191897082 @default.
• W2030861372 hasConceptScore W2030861372C192562407 @default.
• W2030861372 hasConceptScore W2030861372C194760766 @default.
• W2030861372 hasConceptScore W2030861372C197162436 @default.
• W2030861372 hasConceptScore W2030861372C2361726 @default.
• W2030861372 hasConceptScore W2030861372C27050352 @default.
• W2030861372 hasConceptScore W2030861372C2777431650 @default.
• W2030861372 hasConceptScore W2030861372C2779105228 @default.
• W2030861372 hasConceptScore W2030861372C2779227376 @default.
• W2030861372 hasConceptScore W2030861372C2779851234 @default.
• W2030861372 hasConceptScore W2030861372C49040817 @default.
• W2030861372 hasConceptScore W2030861372C52780932 @default.
• W2030861372 hasConceptScore W2030861372C544956773 @default.
• W2030861372 hasIssue "2" @default.
• W2030861372 hasLocation W20308613721 @default.
• W2030861372 hasOpenAccess W2030861372 @default.
• W2030861372 hasPrimaryLocation W20308613721 @default.
• W2030861372 hasRelatedWork W1965769096 @default.
• W2030861372 hasRelatedWork W2030861372 @default.
• W2030861372 hasRelatedWork W2036621201 @default.
• W2030861372 hasRelatedWork W2140476086 @default.
• W2030861372 hasRelatedWork W2150052292 @default.
• W2030861372 hasRelatedWork W2167173940 @default.

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