Matches in SemOpenAlex for { <https://semopenalex.org/work/W2030880503> ?p ?o ?g. }
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- W2030880503 endingPage "2429" @default.
- W2030880503 startingPage "2426" @default.
- W2030880503 abstract "A simple procedure for duplicating original nanoimprint masters was developed by using a new fluorinated photocurable silsesquioxane (SSQ) resin cast on either hard or flexible substrates. With an appropriate viscosity, this resin can be spin coated on the substrate, and the original SiO2 masters easily replicated in this resin by using a low pressure nanoimprinting process. The resin has a sufficient modulus in its cured state, which makes it suitable for nanoimprinting other polymeric materials. Due to the high thermal stability and UV transparency of SSQ materials, such a stamp can be used for both UV and thermal nanoimprinting. Furthermore, the fluoroalkyl groups contained in the silsesquioxane resin provide the low surface energy necessary for easy demolding after nanoimprinting. These features combined make the material an excellent candidate to fabricate a multitude of duplicates from an original nanoimprint lithography master for mass fabrication." @default.
- W2030880503 created "2016-06-24" @default.
- W2030880503 creator A5009677843 @default.
- W2030880503 creator A5078720742 @default.
- W2030880503 creator A5091185666 @default.
- W2030880503 date "2008-11-01" @default.
- W2030880503 modified "2023-09-27" @default.
- W2030880503 title "Easy duplication of stamps using UV-cured fluoro-silsesquioxane for nanoimprint lithography" @default.
- W2030880503 cites W1976368326 @default.
- W2030880503 cites W1986523882 @default.
- W2030880503 cites W1999821333 @default.
- W2030880503 cites W2029422697 @default.
- W2030880503 cites W2032793448 @default.
- W2030880503 cites W2037878295 @default.
- W2030880503 cites W2060548956 @default.
- W2030880503 cites W2062047511 @default.
- W2030880503 cites W2062074587 @default.
- W2030880503 cites W2065752058 @default.
- W2030880503 cites W2078250789 @default.
- W2030880503 cites W2078347637 @default.
- W2030880503 cites W2085641873 @default.
- W2030880503 cites W2088911774 @default.
- W2030880503 cites W2098686532 @default.
- W2030880503 cites W2131507486 @default.
- W2030880503 cites W2143287675 @default.
- W2030880503 cites W2144020819 @default.
- W2030880503 cites W2147960636 @default.
- W2030880503 cites W2158529970 @default.
- W2030880503 doi "https://doi.org/10.1116/1.2987966" @default.
- W2030880503 hasPublicationYear "2008" @default.
- W2030880503 type Work @default.
- W2030880503 sameAs 2030880503 @default.
- W2030880503 citedByCount "17" @default.
- W2030880503 countsByYear W20308805032012 @default.
- W2030880503 countsByYear W20308805032013 @default.
- W2030880503 countsByYear W20308805032014 @default.
- W2030880503 countsByYear W20308805032017 @default.
- W2030880503 countsByYear W20308805032021 @default.
- W2030880503 crossrefType "journal-article" @default.
- W2030880503 hasAuthorship W2030880503A5009677843 @default.
- W2030880503 hasAuthorship W2030880503A5078720742 @default.
- W2030880503 hasAuthorship W2030880503A5091185666 @default.
- W2030880503 hasConcept C105487726 @default.
- W2030880503 hasConcept C127413603 @default.
- W2030880503 hasConcept C136525101 @default.
- W2030880503 hasConcept C142724271 @default.
- W2030880503 hasConcept C159985019 @default.
- W2030880503 hasConcept C162117346 @default.
- W2030880503 hasConcept C171250308 @default.
- W2030880503 hasConcept C192562407 @default.
- W2030880503 hasConcept C204223013 @default.
- W2030880503 hasConcept C204787440 @default.
- W2030880503 hasConcept C2777046567 @default.
- W2030880503 hasConcept C2779063765 @default.
- W2030880503 hasConcept C42360764 @default.
- W2030880503 hasConcept C49040817 @default.
- W2030880503 hasConcept C521977710 @default.
- W2030880503 hasConcept C59061564 @default.
- W2030880503 hasConcept C71924100 @default.
- W2030880503 hasConceptScore W2030880503C105487726 @default.
- W2030880503 hasConceptScore W2030880503C127413603 @default.
- W2030880503 hasConceptScore W2030880503C136525101 @default.
- W2030880503 hasConceptScore W2030880503C142724271 @default.
- W2030880503 hasConceptScore W2030880503C159985019 @default.
- W2030880503 hasConceptScore W2030880503C162117346 @default.
- W2030880503 hasConceptScore W2030880503C171250308 @default.
- W2030880503 hasConceptScore W2030880503C192562407 @default.
- W2030880503 hasConceptScore W2030880503C204223013 @default.
- W2030880503 hasConceptScore W2030880503C204787440 @default.
- W2030880503 hasConceptScore W2030880503C2777046567 @default.
- W2030880503 hasConceptScore W2030880503C2779063765 @default.
- W2030880503 hasConceptScore W2030880503C42360764 @default.
- W2030880503 hasConceptScore W2030880503C49040817 @default.
- W2030880503 hasConceptScore W2030880503C521977710 @default.
- W2030880503 hasConceptScore W2030880503C59061564 @default.
- W2030880503 hasConceptScore W2030880503C71924100 @default.
- W2030880503 hasFunder F4320321001 @default.
- W2030880503 hasIssue "6" @default.
- W2030880503 hasLocation W20308805031 @default.
- W2030880503 hasOpenAccess W2030880503 @default.
- W2030880503 hasPrimaryLocation W20308805031 @default.
- W2030880503 hasRelatedWork W2008754091 @default.
- W2030880503 hasRelatedWork W2021077848 @default.
- W2030880503 hasRelatedWork W2055001723 @default.
- W2030880503 hasRelatedWork W2058556122 @default.
- W2030880503 hasRelatedWork W2082879166 @default.
- W2030880503 hasRelatedWork W2500364019 @default.
- W2030880503 hasRelatedWork W2742452764 @default.
- W2030880503 hasRelatedWork W2883461808 @default.
- W2030880503 hasRelatedWork W3133035002 @default.
- W2030880503 hasRelatedWork W573585812 @default.
- W2030880503 hasVolume "26" @default.
- W2030880503 isParatext "false" @default.
- W2030880503 isRetracted "false" @default.
- W2030880503 magId "2030880503" @default.
- W2030880503 workType "article" @default.