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• W2030946705 endingPage "116" @default.
• W2030946705 startingPage "113" @default.
• W2030946705 abstract "Using an industrial-scale chemical vapor deposition (CVD) system, a series of Ti(C,N) films were deposited from a TiCl4–CH3CN–H2–N2 gas mixture at 850–950 °C and 70–700 mbar with N2/H2 molar ratio varying from 0.27 to 3.77. Within the investigated temperature range, it is found that the growth rate of Ti(C,N) films is strongly dependent on the total pressure. Such behavior agrees with a diffusional limitation step. The lowest growth rate is measured at the N2/H2 molar ratio of 3.77, because of the low reduction rate of TiCl4 in a H2 deficient atmosphere. No significant influence of processing conditions on the carbon content of Ti(C,N) films could be found, as determined by X-ray diffraction and EPMA. The microstructure and mechanical properties were investigated and chiefly influenced by deposition conditions. In this work, the Ti(C,N) films deposited at 850 °C and 70 mbar with N2/H2 molar ratio of 0.27 exhibit a mixed texture with laminated facetted grains, the superior hardness reaching 30 GPa and the Young's modulus of 394 ± 32 GPa were measured. Furthermore, experimental results reveal that residual stresses could be thickness-dependent, due to the evolutionary film microstructure during film growth, and the stress relaxation is particularly attributed to cooling cracks." @default.
• W2030946705 created "2016-06-24" @default.
• W2030946705 creator A5008371045 @default.
• W2030946705 creator A5043744548 @default.
• W2030946705 creator A5059052235 @default.
• W2030946705 date "1996-07-01" @default.
• W2030946705 modified "2023-10-16" @default.
• W2030946705 title "Multiple twins induced <110> preferred growth in TiN and SiC films prepared by CVD" @default.
• W2030946705 cites W1552769505 @default.
• W2030946705 cites W1973178540 @default.
• W2030946705 cites W1976766028 @default.
• W2030946705 cites W1982161580 @default.
• W2030946705 cites W1984012869 @default.
• W2030946705 cites W1985949569 @default.
• W2030946705 cites W1989539313 @default.
• W2030946705 cites W2033992382 @default.
• W2030946705 cites W2044065417 @default.
• W2030946705 cites W2046076289 @default.
• W2030946705 cites W2049649665 @default.
• W2030946705 cites W2063884974 @default.
• W2030946705 cites W2065586390 @default.
• W2030946705 cites W2067873006 @default.
• W2030946705 cites W2074359051 @default.
• W2030946705 cites W2078094692 @default.
• W2030946705 cites W2091577271 @default.
• W2030946705 cites W2101958700 @default.
• W2030946705 cites W2137568740 @default.
• W2030946705 doi "https://doi.org/10.1016/1359-6462(96)00091-7" @default.
• W2030946705 hasPublicationYear "1996" @default.
• W2030946705 type Work @default.
• W2030946705 sameAs 2030946705 @default.
• W2030946705 citedByCount "18" @default.
• W2030946705 countsByYear W20309467052012 @default.
• W2030946705 countsByYear W20309467052013 @default.
• W2030946705 countsByYear W20309467052014 @default.
• W2030946705 countsByYear W20309467052015 @default.
• W2030946705 countsByYear W20309467052017 @default.
• W2030946705 countsByYear W20309467052019 @default.
• W2030946705 countsByYear W20309467052021 @default.
• W2030946705 countsByYear W20309467052022 @default.
• W2030946705 countsByYear W20309467052023 @default.
• W2030946705 crossrefType "journal-article" @default.
• W2030946705 hasAuthorship W2030946705A5008371045 @default.
• W2030946705 hasAuthorship W2030946705A5043744548 @default.
• W2030946705 hasAuthorship W2030946705A5059052235 @default.
• W2030946705 hasConcept C113196181 @default.
• W2030946705 hasConcept C115961682 @default.
• W2030946705 hasConcept C138411078 @default.
• W2030946705 hasConcept C151730666 @default.
• W2030946705 hasConcept C154945302 @default.
• W2030946705 hasConcept C159985019 @default.
• W2030946705 hasConcept C171250308 @default.
• W2030946705 hasConcept C185592680 @default.
• W2030946705 hasConcept C191897082 @default.
• W2030946705 hasConcept C192562407 @default.
• W2030946705 hasConcept C2524010 @default.
• W2030946705 hasConcept C2778312390 @default.
• W2030946705 hasConcept C2781195486 @default.
• W2030946705 hasConcept C2816523 @default.
• W2030946705 hasConcept C33923547 @default.
• W2030946705 hasConcept C41008148 @default.
• W2030946705 hasConcept C43617362 @default.
• W2030946705 hasConcept C525849907 @default.
• W2030946705 hasConcept C57410435 @default.
• W2030946705 hasConcept C64297162 @default.
• W2030946705 hasConcept C86803240 @default.
• W2030946705 hasConcept C87976508 @default.
• W2030946705 hasConceptScore W2030946705C113196181 @default.
• W2030946705 hasConceptScore W2030946705C115961682 @default.
• W2030946705 hasConceptScore W2030946705C138411078 @default.
• W2030946705 hasConceptScore W2030946705C151730666 @default.
• W2030946705 hasConceptScore W2030946705C154945302 @default.
• W2030946705 hasConceptScore W2030946705C159985019 @default.
• W2030946705 hasConceptScore W2030946705C171250308 @default.
• W2030946705 hasConceptScore W2030946705C185592680 @default.
• W2030946705 hasConceptScore W2030946705C191897082 @default.
• W2030946705 hasConceptScore W2030946705C192562407 @default.
• W2030946705 hasConceptScore W2030946705C2524010 @default.
• W2030946705 hasConceptScore W2030946705C2778312390 @default.
• W2030946705 hasConceptScore W2030946705C2781195486 @default.
• W2030946705 hasConceptScore W2030946705C2816523 @default.
• W2030946705 hasConceptScore W2030946705C33923547 @default.
• W2030946705 hasConceptScore W2030946705C41008148 @default.
• W2030946705 hasConceptScore W2030946705C43617362 @default.
• W2030946705 hasConceptScore W2030946705C525849907 @default.
• W2030946705 hasConceptScore W2030946705C57410435 @default.
• W2030946705 hasConceptScore W2030946705C64297162 @default.
• W2030946705 hasConceptScore W2030946705C86803240 @default.
• W2030946705 hasConceptScore W2030946705C87976508 @default.
• W2030946705 hasIssue "1" @default.
• W2030946705 hasLocation W20309467051 @default.
• W2030946705 hasOpenAccess W2030946705 @default.
• W2030946705 hasPrimaryLocation W20309467051 @default.
• W2030946705 hasRelatedWork W1972254111 @default.
• W2030946705 hasRelatedWork W1996435237 @default.
• W2030946705 hasRelatedWork W2029850737 @default.
• W2030946705 hasRelatedWork W2053623882 @default.
• W2030946705 hasRelatedWork W2063388647 @default.

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